US 6,538,748 B1 · Tunable Fabry-Perot filters and lasers utilizing feedback to reduce frequency noise

Abstract

A tunable optical cavity constructed from a fixed mirror and a movable mirror is disclosed. A circuit applies an electrical potential between first and second electrically conducting surfaces thereby adjusting the distance between the fixed and movable mirrors. The fixed mirror and the moveable mirror are positioned such that the mirrors form the opposite ends of the optical cavity. The distance between the fixed mirror and the moveable mirror is a function of the applied electrical potential. The thermally induced vibrations are reduced by utilizing an electrical feedback circuit that measures the distance between the mirrors. The feedback circuit dynamically changes the potential between the substrate and the support member so as to reduce fluctuations in the cavity resonance frequency.

Claims7

Dependent claims

A tunable optical cavity having a resonant wavelength selectable in a range about a predetermined wavelength, said cavity comprising:

a fixed mirror attached to a substrate having a first electrically conducting surface;
a support member having a moveable mirror supported thereon, said support member having a second electrically conducting surface, said support member being suspended above said substrate;
a drive circuit for applying an electrical potential between said first and second electrically conducting surfaces;
and
a measurement circuit for measuring the distance between said fixed and moveable mirrors and for adjusting said applied potential in response to said measurement.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application

09/550,548Filed 14 Apr 2000

Granted

25 Mar 2003

Term ends

Not estimatedThe source records don’t support an estimate.

Classification11 codes

G02B 26/02
Optical devices or arrangements for the control of light using movable or deformable optical elements: for controlling the intensity of light
G01J 3/26
Generating the spectrum; Monochromators: using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
G02B 26/001
Optical devices or arrangements for the control of light using movable or deformable optical elements: based on interference in an adjustable…
H01S 5/041
Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams: optical pumping

Tunable Fabry-Perot filters and lasers utilizing feedback to reduce frequency noise

Life of this patent

Tunable Fabry-Perot filters and lasers utilizing feedback to reduce frequency noise

Life of this patent

Abstract

Claims7