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US 6,536,287 B2Granted
Simplified capacitance pressure sensor
AssigneeHoneywell International Inc.
InventorsHarold Beekhuizen, Armand Issaian, Charles H. Umeda
Life of this patent
Estimating the term…
Abstract
A capacitance pressure sensor includes a pressure diaphragm, an acceleration diaphragm, and a support member. The pressure diaphragm and acceleration diaphragm each include electrodes on surfaces that face each other, thereby forming a pressure sensitive capacitor. The pressure sensitive capacitor is coupled to the support member, which is in turn directly coupled to a base plate. The structure of the pressure sensor is simplified structure in that it includes no additional stress isolation components.
Claims35
A pressure sensor, comprising:
- a sensor portion;
- a support member coupled to the sensor portion and including a plurality of electrically conductive films on a surface thereof;
- a base plate including a mounting surface and a plurality of terminals passing therethrough, the mounting surface coupled to the support member;
- and
- a plurality of electrically conductive flexible interconnect members individually coupled between the plurality of electrically conductive films and the plurality of terminals.
2 more elements
A capacitive pressure sensor, comprising:
- a first diaphragm including a peripheral portion, a first surface, and a second surface, the first surface having a first electrode deposited thereon;
- a second diaphragm including a peripheral portion, a first surface, and a second surface, the second diaphragm first surface having a second electrode deposited thereon, the second diaphragm peripheral portion coupled to the first diaphragm peripheral portion with the second diaphragm first surface positioned adjacent to and spaced apart from the first diaphragm first surface to define a first space there between;
- and
- a support member including a peripheral portion, a first surface, and a second surface, the support member peripheral portion coupled to the second diaphragm peripheral portion with the support member first surface positioned adjacent to and spaced apart from the second diaphragm second surface to define a second space there between;
- first and second electrically conductive flexible interconnect members electrically coupled to the first and second electrodes, respectively;
- and
- base plate including a support surface coupled to the support member second surface,
- wherein the first electrode, the second electrode, and first space form a capacitor.
5 more elements
A capacitive pressure sensor, comprising:
- a first diaphragm including a peripheral portion, a first surface having a first electrode deposited thereon, and a second surface having a second electrode deposited thereon;
- a second diaphragm including a peripheral portion, a first surface having a third electrode deposited thereon, and a second surface having a fourth electrode deposited thereon, the second diaphragm peripheral portion coupled to the first diaphragm peripheral portion with the second diaphragm first surface positioned adjacent to and spaced apart from the first diaphragm first surface to define a first space there between;
- and
- a support member including a peripheral portion, a first surface, and a second surface, the support member peripheral portion coupled to the second diaphragm peripheral portion with the support member first surface positioned adjacent to and spaced apart from the second diaphragm second surface to define a second space there between;
- first and second conductive films deposited on the support member second surface;
- a base plate including a mounting surface coupled to the support member second surface;
- first and second leads electrically coupled between the first and third electrodes and the first and second conductive film, respectively;
- first and second terminals passing through, and sealed to, individual openings in the base plate;
- first and second electrically conductive sealing caps electrically coupled to the first and second conductive films, respectively;
- and
- first and second electrically conductive flexible interconnect members electrically coupled between the first and second sealing caps and the first and second terminals, respectively,
- wherein the first electrode, the third electrode, and the first space form a capacitor.
9 more elements
Dependencies are inferred from the claim text.