Method for localizing and isolating an errant process step
AssigneeUT-Battelle, LLC
InventorsKenneth W. Tobin, Jr., Thomas P. Karnowski, Regina K. Ferrell
Life of this patent
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AssigneeUT-Battelle, LLC
InventorsKenneth W. Tobin, Jr., Thomas P. Karnowski, Regina K. Ferrell
Estimating the term…
A method for localizing and isolating an errant process includes the steps of retrieving from a defect image database a selection of images each image having image content similar to image content extracted from a query image depicting a defect, each image in the selection having corresponding defect characterization data. A conditional probability distribution of the defect having occurred in a particular process step is derived from the defect characterization data. A process step as a highest probable source of the defect according to the derived conditional probability distribution is then identified. A method for process step defect identification includes the steps of characterizing anomalies in a product, the anomalies detected by an imaging system. A query image of a product defect is then acquired. A particular characterized anomaly is then correlated with the query image. An errant process step is then associated with the correlated image.
A method for localizing and isolating an errant process step in multi-step processes, comprising the steps of:
A method for process step defect identification comprising the steps of:
A computer apparatus programmed with a routine set of instructions stored in a fixed medium comprising:
Dependencies are inferred from the claim text.