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US 6,535,541 B1Granted
Vertical cavity apparatus with tunnel junction
AssigneeBandwidth 9, Inc.
InventorsJulien Boucart, Constance Chang-Hasnain, Michael Jansen, Rashit Nabiev, Wupen Yuen
Life of this patent
Estimating the term…
Abstract
A vertical cavity apparatus includes first and second mirrors, a substrate, first and second active regions and a plurality of individual active regions. Each of an individual active region is positioned between the first and second active regions. A first oxide layer is positioned between the first mirror and the second mirror. A plurality of tunnel junctions are positioned between the first and second mirrors.
Claims55
A vertical cavity apparatus, comprising:
- a first mirror;
- a substrate
- a second mirror coupled to the substrate;
- a first active region positioned adjacent to the first mirror;
- a second active region positioned adjacent to the second mirror, each of the first and second active regions being made of a material that upon application of electrical or electromagnetic energy the first and second regions become optically active;
- a plurality of individual active regions, each of an individual active region being positioned between the first and second active regions and made of a material that upon application of electrical or electromagnetic energy becomes optically active;
- a first oxide layer positioned between the first mirror and the second mirror;
- and
- a plurality of tunnel junctions positioned between the first and second mirrors.
6 more elements
The apparatus of cam 1, wherein the substrate has a etched pattern formed on a top or a bottom surface.
A vertical cavity surface emitting laser, comprising:
- a first mirror;
- a substrate
- a second mirror coupled to the substrate;
- a first active region positioned adjacent to the first mirror, each of the first and second active regions being made of a material that upon application of electrical or electromagnetic energy the first and second regions become optically active;
- a second active region positioned adjacent to the second mirror;
- a plurality of individual active regions, each of an individual active region being positioned between the first and second active regions;
- a first oxide layer positioned between the first mirror and the second mirror;
- and
- a plurality of tunnel junctions positioned between the first and second mirrors.
6 more elements
A detector, comprising:
- a first mirror;
- a substrate
- a second mirror coupled to the substrate;
- a first active region positioned adjacent to the first mirror, each of the first and second active regions being made of a material that upon application of electrical or electromagnetic energy the first and second regions become optically active;
- a second active region positioned adjacent to the second mirror;
- a plurality of individual active regions, each of an individual active region being positioned between the first and second active regions;
- a first oxide layer positioned between the first mirror and the second mirror;
- and
- a plurality of tunnel junctions positioned between the first and second mirrors.
6 more elements
A modulator, comprising:
- a first mirror;
- a substrate
- a second mirror coupled to the substrate;
- a first active region positioned adjacent to the first mirror, each of first and second active regions being made of a material that upon application of electrical or electromagnetic energy the first and second regions become optically active;
- a second active region positioned adjacent to the second mirror;
- a plurality of individual active regions, each of an individual active region being positioned between the first and second active regions;
- a first oxide layer positioned between the first mirror and the second mirror;
- and
- a plurality of tunnel junctions positioned between the first and second mirrors.
6 more elements
An attenuator, comprising:
- a first mirror;
- a substrate
- a second mirror coupled to the substrate;
- a first active region positioned adjacent to the first mirror, each of the first and second active regions being made of a material that upon application of electrical or electromagnetic energy the first and second regions become optically active;
- a second active region positioned adjacent to the second mirror;
- a plurality of individual active regions, each of an individual active region being positioned between the first and second active regions;
- a first oxide layer positioned between the first mirror and the second mirror;
- and
- a plurality of tunnel junctions positioned between the first and second mirrors.
6 more elements
An amplifier, comprising:
- a first mirror;
- a substrate
- a second mirror coupled to the substrate;
- a first active region positioned adjacent to the first mirror, each of the first and second active regions being made of a material that upon application of electrical or electromagnetic energy the first and second regions become optically active;
- a second active region positioned adjacent to the second mirror;
- a plurality of individual active regions, each of an individual active region being positioned between the first and second active regions;
- a first oxide layer positioned between the first mirror and the second mirror;
- and
- a plurality of tunnel junctions positioned between the first and second mirrors.
6 more elements
Dependencies are inferred from the claim text.