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US 6,534,900 B2Granted
Piezoresonator
AssigneeInfineon Technologies AG
InventorsRobert Aigner, Stephan Marksteiner
Life of this patent
Estimating the term…
Abstract
A thin film piezoresonator, which can be tuned over a wide range of RF frequencies, includes a piezo layer between a first electrode layer and a second electrode layer. An electroactive layer of an electrostrictive material, which experiences a mechanical deformation when an electrical voltage is applied, is disposed between a third electrode layer and the second electrode layer.
Claims14
A thin film piezoresonator, comprising:
- a first electrode layer;
- a second electrode layer;
- a third electrode layer;
- a piezo layer disposed between said first and second electrode layers;
- an electroactive layer disposed between said second and third electrode layers;
- said second and third electrode layers and said electroactive layer defining a layer stack, a layer plane, and a vertical direction along a line substantially perpendicular to said layer plane;
- said electroactive layer being formed of a material contracting said electroactive layer in said vertical direction when a D.C. voltage is applied between said second electrode layer and said third electrode layer to change a resonance frequency of said layer stack for tuning the piezoresonator;
- and
- a series of layers formed alternately of a material of low acoustic impedance and a material of high acoustic impedance, said piezo layer and said electroactive layer disposed on said series of layers.
6 more elements
A thin film piezoresonator, comprising:
- a first electrode layer;
- a second electrode layer;
- a third electrode layer;
- a piezo layer disposed between said first and second electrode layers;
- an at least predominantly electrostrictive electro-active material layer disposed between said second and third electrode layers;
- said second and third electrode layers and said at least predominantly electrostrictive electro-active material layer defining a layer stack, a layer plane, and a vertical direction along a line substantially perpendicular to said layer plane;
- and
- said at least predominantly electrostrictive electro-active material layer being formed of a material contracting said at least predominantly electrostrictive electro-active material layer in said vertical direction when a D.C. voltage is applied between said second electrode layer and said third electrode layer to change a resonance frequency of said layer stack for tuning the piezoresonator.
5 more elements
A thin film piezoresonator, comprising:
- a first electrode layer;
- a second electrode layer;
- a third electrode layer;
- a piezo layer disposed between said first and second electrode layers;
- an electroactive layer being formed of lead magnesium niobate disposed between said second and third electrode layers;
- said second and third electrode layers and said electroactive layer defining a layer stack, a layer plane, and a vertical direction along a line substantially perpendicular to said layer plane;
- and
- said electroactive layer being formed of a material contracting said electroactive layer in said vertical direction when a D.C. voltage is applied between said second electrode layer and said third electrode layer to change a resonance frequency of said layer stack for tuning the piezoresonator.
5 more elements
Dependencies are inferred from the claim text.