Method of manufacturing fluid pump

Abstract

A method of manufacturing a pump [10] for pumping various primary fluids. A body is formed from silicon dies [102,104]. A primary fluid channel [110] is formed in the body and a primary fluid supply [122] is coupled to the primary fluid channel [110] to supply a primary fluid to the primary fluid channel [110]. A mechanism for introducing a secondary fluid to an interface region of the primary fluid channel [110] is formed in the body. An energy delivery device is formed in the body to deliver energy to an interface between region between the primary fluid and the secondary fluid to create a thermal gradient along the fluid interface. The thermal gradient results in a surface tension gradient along the interface. The primary fluid will move to compensate for the surface tension gradient. Various semiconductor fabrication processes can be used to form the elements on the body.

Dependencies are inferred from the claim text.