Integrated circuit inductor with a magnetic core
AssigneeMicron Technology, Inc.
InventorsKie Y. Ahn, Leonard Forbes
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Abstract
An inductor is fabricated on a substrate having a top surface and a bottom surface. The inductor includes a plurality of holes extending through the substrate, wherein the plurality of holes interconnect the top surface and the bottom surface of the substrate. The inductor also includes a plurality of conductive posts formed in the plurality of holes and a plurality of conductive segments formed on the top surface and on the bottom surface that interconnect the conductive posts such that a continuous conductive coil is formed. The inductor also includes a magnetic core that occupies substantially the entire volume enclosed by the conductive coil.
Claims15
An inductor comprising:
- a substrate;
- a magnetic core embedded within said substrate;
- and
- a three-dimensional conductive coil comprising a plurality of conductive posts interconnected by a plurality of conductive segments,
- wherein said conductive coil surrounds said magnetic core, and
- wherein said magnetic core comprises a porous region of said substrate having a ferromagnetic material deposited therein.
A method of fabricating an inductor embedded in a substrate, said method comprising the steps of:
- forming a plurality of paths extending through said substrate;
- forming a magnetic core in said substrate;
- depositing a conductive material in said paths to form a plurality of conductive posts;
- and
- fabricating a plurality of conductive segments that interconnect said conductive posts to form a conductive coil,
- wherein said step of forming a magnetic core comprises:
- forming a porous region in said substrate;
- and
- depositing a ferromagnetic material in said porous region.
Dependencies are inferred from the claim text.