Process equipment selecting system and method for selecting process equipment

A method for selecting process equipment in a process equipment selection system for selecting process equipment for each lot, said process equipment selection system comprising:

• a process master control portion for controlling the order of process steps producing the lot, together with a process equipment group including at least one unit of equipment used for said process, a control type showing whether or not the specification of process equipment used for said process is controlled, and an element process that said process can include;
• a lot information control portion for controlling an equipment-specific process equipment group including at least one unit of process equipment most suitable for element process for each lot and the element process of said lot;
• and
• an equipment-specific process equipment control means controlling the process equipment included in equipment-specific process equipment group for each of said equipment-specific process equipment groups, said method for selecting process equipment comprising:
• an equipment-specific process equipment acquiring step for acquiring an equipment-specific process equipment group specifically used from said lot information control portion, when the control type of said process master control portion indicates controlling the specification of process equipment for producing the lot;
• and
• a selection step for selecting the process equipment included in said equipment-specific process equipment group acquiring step from the equipment-specific process equipment control portion.