Method and apparatus for automatic routing for reentrant processes
AssigneeAdvanced Micro Devices, Inc.
InventorsWilliam Jarrett Campbell, Anthony J. Toprac, Christopher A. Bone
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Abstract
The present invention provides for a method and an apparatus for automatic routing of semiconductor devices within a manufacturing area. Performance of a plurality of manufacturing tools is tracked while processing semiconductor devices. At least one optimal combination of the manufacturing tools is determined based upon the tracked performance of the manufacturing tools. A queuing system is implemented to attain the optimal combination of the manufacturing tools. A dispatch system is deployed in response to the queuing system for routing the semiconductor devices within the manufacturing area.
Claims11
A method for automatic routing of semiconductor devices within a manufacturing area, comprising:
- tracking performance of a plurality of manufacturing tools while processing semiconductor devices;
- determining at least one optimal combination of said manufacturing tools based upon said tracked performance of said manufacturing tools;
- implementing a queuing system to attain said optimal combination of said manufacturing tools;
- and
- deploying a dispatch system in response to said queuing system for routing said semiconductor devices within said manufacturing area.
A system, comprising:
- a plurality of processing tools to process a batch of semiconductor wafers;
- a computer system operatively coupled to said processing tools, said computer system comprising a controller to control operations of said processing tools, said controller being adapted to:
- track performance of said plurality of processing tools;
- and
- determine a combination of said processing tools for queuing said semiconductor wafers for processing by said processing tools based upon said performance of said plurality of processing tools.
Dependencies are inferred from the claim text.