Microelectromechanical (MEMS) switch using stepped actuation electrodes
AssigneeIntel Corporation
InventorQing Ma
Life of this patent
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Abstract
A microelectromechanical (MEMS) switch is described. The switch comprises a cantilever beam having a proximal end and a distal end. The cantilever beam is supported by its proximal end above a substrate by a raised anchor. An intermediate actuation electrode is placed beneath the cantilever beam and is separated from the bottom of the cantilever beam by a narrow gap. Finally, a contact pad or transmission line is placed beneath the cantilever beam and separated from the bottom of the cantilever beam by a larger gap.
Claims27
A switch comprising:
- a cantilever beam having a proximal end and a distal end, said cantilever beam supported by said proximal end above a substrate;
- an intermediate actuation electrode placed beneath said cantilever beam at a first distance from its proximal end and forming a first gap therebetween, to operate as a first actuation electrode;
- and
- a transmission line placed beneath said cantilever beam at a second distance from its proximal end and forming a second gap therebetween, to operate as a second actuation electrode.
A microelectromechanical system (MEMS) switch comprising:
- a polysilicon cantilever beam having a proximal end and a distal end, said cantilever beam supported by said proximal end above a substrate;
- an intermediate actuation electrode placed beneath said cantilever beam at a said intermediate actuation electrode a first distance beneath said cantilever beam;
- and
- a contact pad placed beneath said cantilever beam, said contact pad a second distance beneath said cantilever beam.
A switch comprising:
- a bridge beam supported above a substrate by at least two anchors;
- an intermediate actuation electrode placed beneath said bridge beam between said two anchors, said intermediate actuation electrode a first distance beneath said bridge beam and to operate as a first actuation electrode;
- and
- a transmission line placed beneath said bridge beam between said two anchors, said transmission line a second distance beneath said bridge beam and to operate as a second actuation electrode.
A microelectromechanical system (MEMS) switch comprising:
- a cantilever beam having a proximal end and a distal end, said cantilever beam supported by said proximal end above a substrate;
- an intermediate actuation electrode placed beneath said cantilever beam at a said intermediate actuation electrode a first distance beneath said cantilever beam;
- and
- a polysilicon contact pad placed beneath said cantilever beam, said contact pad a second distance beneath said cantilever beam.
Dependencies are inferred from the claim text.