Pre-heating and load lock pedestal material for high temperature CVD liquid crystal and flat panel display applications
AssigneeApplied Materials, Inc.
InventorsWilliam A. Bagley, Ericka M. Ramirez, Stephen C. Wolgast
Life of this patent
Estimating the term…
Abstract
An apparatus for supporting a glass substrate is provided. In one embodiment, a substrate support is provided having a base structural member and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a glass substrate supported thereon. The substrate supports may be utilized in various chambers such as load locks chamber and chambers having thermal processes.
Claims43
An apparatus for supporting a glass substrate, comprising:
- a support element;
- a plurality of support members disposed on the support element, at least one of the support members comprising:
- a base structural member coupled to the support element;
- and
- a rounded top portion adapted to support the glass substrate in a spaced-apart relation to the support element;
- and
- a plurality of mounting pins coupled to the support element, each pin engaged with a respective support member.
An apparatus for supporting a glass substrate, comprising:
- a shelf;
- a plurality of support members disposed on the shelf, at least one of the support members comprising:
- a base structural member coupled to the shelf;
- a top portion adapted to support the glass substrate in a spaced-apart relation to the shelf;
- a coating disposed on at least a tip of the top portion;
- and
- a plurality of mounting pins coupled to the support element, each pin engaged with a respective support member.
An apparatus for supporting a glass substrate, comprising:
- a chamber;
- a plurality of shelves disposed in a spaced-apart relation in the chamber, each shelf having a plurality of support members disposed thereon, at least one of the support members comprising:
- a base structural member coupled to the shelf;
- and
- a rounded top portion adapted to support the glass substrate in a spaced-apart relation to the shelf;
- and
- a plurality of mounting pins coupled to each shelf, each pin engaged with a respective support member.
Apparatus for supporting a glass substrate, comprising:
- a chamber body having a least one sidewall;
- a plurality of support elements coupled to the sidewall;
- a first slit valve selectively sealing a first glass transfer port disposed in the chamber body;
- and
- a second slit valve selectively sealing a second glass transfer port disposed in the chamber body;
- a plurality of support members disposed on the support elements, where at least one of the support members comprises:
- a base structural member coupled to the support elements;
- and
- a rounded top portion adapted to support the glass substrate in a spaced-apart relation to the support element;
- and
- a plurality of mounting pins coupled to the support element, each pin engaged with a respective support member.
An apparatus for supporting a glass substrate, comprising:
- a support element;
- a plurality of mounting pins coupled to the support element;
- a plurality of support members disposed on the mounting pins, at least one of the support members comprising:
- a hollow base portion adapted to receive at least a portion of the mounting pin;
- and
- a rounded top portion adapted to support the glass substrate in a spaced-apart relation to the support element.
Dependencies are inferred from the claim text.