Disk carrier
AssigneeKomag, Inc.
InventorTin Nguyen
Life of this patent
Estimating the term…
Abstract
A first disk carrier constructed in accordance with the invention is substantially circular, and has a size and shape such that it can be placed in an opening in a second, larger disk carrier. In one embodiment, the second, large disk carrier is a conventional disk carrier, e.g. used to hold a substrate during a magnetic disk manufacturing process. The first disk carrier is circular, and has a diameter equal (or substantially equal) to common substrates currently being manufactured. Therefore, the first disk carrier fits in and can be held by the second disk carrier. The first disk carrier has one or more openings for holding one or more substrates that have a diameter substantially less than the diameter of the opening of the second disk carrier.
Claims57
A method comprising:
- loading one or more substrates into a first substrate carrier, said first substrate carrier comprising one or more openings, each of said one or more openings accommodating one of said substrates, said first substrate carrier having an exterior such that said first carrier can be loaded into an opening in a second substrate carrier.
Method comprising unloading a first holder from a cassette, said first holder having one or more openings for receiving a substrate, said first holder having an exterior for being received by a second holder.
A method comprising:
- providing a first holder having one or more openings, each opening for holding a substrate, said first holder for permitting deposition of material on a first number of substrates;
- and
- providing a second holder in at least one of said one or more openings in said first holder, said second holder comprising a plurality of openings for holding substrates, wherein said second holder permits an increase in throughput during deposition.
Deposition apparatus comprising:
- a first holder having one or more openings, each opening for holding a substrate, said apparatus permitting deposition of material on a first number of substrates;
- and
- a second holder provided in at least one of said one or more openings in said first holder, said second holder comprising a plurality of openings for holding substrates, wherein said second holder permits an increase in throughput during deposition.
Method comprising:
- loading one or more substrates into a first substrate carrier, said first substrate carrier having an exterior shaped to be received by an opening in a second substrate carrier;
- and
- loading said first substrate carrier into a cassette.
Method comprising:
- providing a cassette, said cassette containing at least one substrate carrier said substrate carrier comprising at least one opening, said opening containing a substrate;
- and
- removing said at least one substrate carrier from said cassette.
A method comprising:
- providing a first substrate carrier having one or more openings, at least one of said one or more of said openings holding a substrate, said first substrate carrier being held by an opening in a second substrate carrier;
- and
- depositing material onto said substrate.
A method comprising:
- providing a first substrate carrier having one or more openings, at least one of said one or more of said openings holding a substrate, said first substrate carrier being held by a second substrate carrier, wherein said first substrate carrier has a substantially circular exterior for mating with an opening within said second substrate carrier;
- and
- depositing material onto said substrate.
Method comprising:
- providing a first substrate carrier having one or more openings, at least one of said one or more of said openings holding a substrate, said first substrate carrier being held by a second substrate carrier;
- and
- unloading said first substrate carrier from said second substrate carrier.
Method comprising:
- providing a first substrate carrier having one or more openings, at least one of said one or more of said openings holding a substrate, said first substrate carrier being held by an opening in a second substrate carrier;
- and
- unloading said one or more substrates from said first substrate carrier.
Method comprising:
- providing a first substrate carrier having one or more openings, at least one of said one or more of said openings holding a substrate, said first substrate carrier being held by a second substrate carrier, wherein said first substrate carrier has a substantially circular exterior for mating with an opening in said second substrate carrier;
- and
- unloading said one or more substrates from said first substrate carrier.
Method comprising:
- providing a first substrate carrier, said first substrate carrier comprising at least a first opening for holding a substrate and at least a second opening for receiving a tool;
- providing a tool having a member for being received by and mating with said second opening;
- and
- causing said member to mate with said second opening so that said first substrate carrier is held by said tool.
Method comprising loading a first substrate carrier into an opening of a second substrate carrier, said first substrate carrier comprising one or more openings for receiving substrates.
Method comprising loading a first holder into a cassette, said first holder having one or more openings for receiving a substrate, said first holder having an exterior for being received by a second holder.
Apparatus comprising:
- a first substrate carrier having at least one opening for holding a substrate and an exterior for being held by a second substrate carrier, wherein said first substrate carrier has a substantially circular exterior.
A method comprising:
- providing a first holder having one or more openings, each opening for holding a substrate, said first holder for permitting deposition of material on a first number of substrates;
- and
- providing a second holder in at least one of said one or more openings in said first holder, said second holder comprising a plurality of openings for holding substrates, wherein said second holder permits an increase in the number of substrates upon which material can be deposited simultaneously.
Deposition apparatus comprising:
- a first holder having one or more openings, each opening for holding a substrate, said apparatus permitting deposition of material on a first number of substrates;
- and
- a second holder provided in at least one of said one or more openings in said first holder, said second holder comprising a plurality of openings for holding substrates, wherein said second holder permits an increase in the number of substrates upon which material can be deposited simultaneously.
Apparatus comprising:
- a first substrate carrier having at least one opening for holding a substrate and an exterior for being held by an opening in a second substrate carrier.
Apparatus comprising:
- a first substrate carrier having at least one opening for holding a substrate and an exterior for being held by a second substrate carrier, wherein said first substrate carrier has a second opening for mating with a tool, said apparatus further comprising a tool comprising a member shaped for mating with said second opening.
Dependencies are inferred from the claim text.