Hydrogen annealing process and apparatus therefor
AssigneeHitachi Kokusai Electric Inc.
InventorsYasunori Takakuwa, Kouji Tometsuka
Life of this patent
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Abstract
An apparatus for selectively implementing a depressurized or an atmospheric hydrogen annealing process comprises a reaction chamber, a hydrogen gas introduction line for feeding hydrogen gas into the reaction chamber and an atmospheric exhaust line and a depressurized exhaust line, which are connected to the reaction chamber. By selectively switching the atmospheric exhaust line and the depressurized exhaust line, the depressurized hydrogen annealing process and the atmospheric annealing process are selectively implemented. A device for performing deoxidization process or a device for removing impurities may be further included.
Claims12
A method for performing a hydrogen annealing process in a hydrogen annealing apparatus, wherein the hydrogen annealing apparatus include a reaction chamber, a hydrogen gas introduction line for feeding hydrogen gas into the reaction chamber, an atmospheric exhaust line and a depressurized exhaust line, comprising the step of:
- switching the atmospheric exhaust line and the depressurized exhaust line for its connection to the reaction chamber to selectively perform a depressurized hydrogen annealing process or an atmospheric hydrogen annealing process in the reaction chamber.
A hydrogen annealing apparatus comprising:
- a reaction chamber;
- a hydrogen gas introduction line for feeding hydrogen gas into the reaction chamber;
- an exhaust line connected to the reaction chamber;
- an exhaust device installed on the exhaust line;
- and
- an exhaust dilution line for providing a dilution gas to a downstream of the exhaust device to lower a hydrogen concentration therein below a predetermined value.
A hydrogen annealing apparatus comprising:
- a reaction chamber;
- a hydrogen gas introduction line for feeding hydrogen gas into the reaction chamber;
- an atmospheric exhaust line;
- a depressurized exhaust line;
- and
- a valve for selectively switching the atmospheric or the depressurized exhaust line for its connection to the reaction chamber to selectively perform a depressurized hydrogen annealing process or an atmospheric hydrogen annealing process in the reaction chamber.
A hydrogen annealing apparatus, which includes a reaction chamber, an atmospheric exhaust line and a depressurized exhaust line, comprising:
- means for feeding hydrogen gas into the reaction chamber;
- and
- means for switching the atmospheric exhaust line and the depressurized exhaust line for its connection to the reaction chamber to selectively perform a depressurized hydrogen annealing process or an atmospheric hydrogen annealing process in the reaction chamber.
Dependencies are inferred from the claim text.