Corrosion-resistant member and method of producing the same
AssigneeNGK Insulators, Ltd.
InventorKiyoshi Araki
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Abstract
A corrosion-resistant member includes a substrate made of an aluminum-containing ceramic material and an aluminum fluorine containing film which coats at least a part of a surface of the substrate. The aluminum fluorine-containing film, which is formed by directly contacting the substrate with a fluorine-containing compound, has a thickness of 0.01-5.0 μm. The substrate contains silicon in an amount of not more than 0.5% by weight when calculated as silicon dioxide. Thereby, changes in weight due to corrosion can be decreased and generation of particles can be further controlled upon exposure to a corrosive halogen gas.
Claims5
A corrosion-resistant member comprising a substrate made of an aluminum-containing ceramic material and an aluminum fluorine-containing film which coats at least a part of a surface of the substrate, wherein the aluminum fluorine-containing film is formed by directly contacting the substrate with a fluorine-containing compound and has a thickness of 0.01-5.0 μm, and the substrate contains silicon in an amount of not more than 0.5% by weight when calculated as silicon dioxide.
Dependencies are inferred from the claim text.