Vacuum processing apparatus and semiconductor manufacturing line using the same
AssigneeHitachi, Ltd.
InventorsMinoru Soraoka, Ken Yoshioka, Yoshinao Kawasaki
Life of this patent
Estimating the term…
Abstract
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing vacuum processing to the sample and a vacuum transfer means for transferring the sample. Both of the plan views of the cassette block and the vacuum processing block are nearly rectangular, and the width of the cassette block is designed larger than the width of the vacuum processing block, and the plan view of the vacuum processing apparatus is formed in an L-shape or a T-shape.
Claims20
A vacuum processing apparatus comprising a cassette block and a vacuum processing block, said cassette block having a cassette table for mounting a plurality of cassettes, each containing a sample, said vacuum processing block having a plurality of processing chambers for treating a sample and vacuum transfer means for transferring said sample, wherein
- both of the shapes of said cassette block and said vacuum processing block are rectangular in plan view and the relation W1−W2≧CW is satisfied, where W1 is the width of said cassette block, W2 is the width of said vacuum processing block, and CW is the width of said cassette.
A vacuum processing apparatus comprising a cassette block and a vacuum processing block, said cassette block having a cassette table for mounting a plurality of cassettes, each containing a sample, and atmospheric transfer means for transferring a sample, said vacuum processing block having a plurality of processing chambers for performing vacuum processing on said sample, a load lock chamber on the loading side, a load lock chamber on the unloading side and vacuum transfer means for transferring said sample between said processing chambers and said load lock chambers on the loading side and the unloading side, said atmospheric transfer means transferring said sample between said cassette and both load lock chambers, wherein
- both of the shapes of said cassette block and said vacuum processing block are rectangular in plan view and the relation W1−W2≧CW is satisfied, where W1 is the width of said cassette block, W2 is the width of said vacuum processing block and CW is the width of one cassette.
A vacuum processing apparatus comprising a cassette block and a vacuum processing block, said cassette block having a cassette table for mounting a plurality of cassettes, each containing a sample, and atmospheric transfer means for transferring a sample, said vacuum processing block having a plurality of processing chambers for performing vacuum processing on said sample, a load lock chamber on the loading side, a load lock chamber on the unloading side and vacuum transfer means for transferring said sample between said processing chambers and said load lock chambers on the loading side and the unloading side, said atmospheric transfer means transferring said sample between said cassette and both load lock chambers, wherein
- both of the shapes of said cassette block and said vacuum processing block are rectangular in plan view and the width of said vacuum processing block is smaller than the width of said cassette block, and said vacuum processing apparatus is formed, as seen in plan view, in any one of an L-shape and a T-shape.
A vacuum processing apparatus comprising a cassette block, a vacuum processing block and atmospheric transfer means for transferring a sample between both blocks, said cassette block having a cassette table for mounting a plurality of cassettes, each containing a sample, said vacuum processing block having a plurality of processing chambers for performing vacuum processing on a sample, a load lock chamber on the loading side, a load lock chamber on the unloading side and vacuum transfer means for transferring said sample between said processing chambers and said load lock chambers on the loading side and the unloading side, said atmospheric transfer means for transferring said sample between said cassette and both load lock chambers, wherein
- both of the shapes of said cassette block and said vacuum processing block are rectangular in plan view and the relation W1−W2≧CW is satisfied, where W1 is the width of said cassette block, W2 is the width of said vacuum processing block, and CW is the width of one cassette.
A vacuum processing apparatus comprising a cassette block and a vacuum processing block, said cassette block having a cassette table for mounting a plurality of cassettes, each containing a sample, said vacuum processing block having a plurality of processing chambers for performing vacuum processing on said sample, a load lock chamber on the loading side, a load lock chamber on the unloading side and vacuum transfer means for transferring said sample between said processing chambers and said load lock chambers on the loading side and the unloading side, said atmospheric transfer means for transferring said sample between said cassette and both load lock chambers, wherein
- both of the shapes of said cassette block and said vacuum processing block, as seen in plan view, are rectangular, and the relation W1−W2≧CW and G1<G2 are satisfied, where W1 is the width of said cassette block, W2 is the width of said vacuum processing block, G1 is a gap between cassette blocks adjacent to each other, G2 is a gap between vacuum processing blocks adjacent to each other and CW is the width of one cassette.
A vacuum processing apparatus comprising a cassette block and a vacuum processing block, said cassette block having a cassette table for mounting a plurality of cassettes, each containing a sample, said vacuum processing block having an etching processing apparatus for performing etching processing on a sample and vacuum transfer means for transferring said sample, wherein
- both said cassette block and said vacuum processing block are rectangular in plan view and the relation W1−W2≧CW is satisfied, wherein W1 is the width of said cassette block, W2 is the width of said vacuum processing block, and CW is the width of one cassette.
A vacuum processing apparatus comprising a cassette block and a vacuum processing block, said cassette block having a cassette table for mounting a plurality of cassettes, each containing a sample, said vacuum processing block having a plurality of processing chambers for treating a sample and vacuum transfer means for transferring said sample, wherein
- both of the shapes of said cassette block and said vacuum processing block are strictly rectangular in plan view and the relation W1−W2≧CW is satisfied, where W1 is the width of said cassette block, W2 is the width of said vacuum processing block, and CW is the width of said cassette.
A vacuum processing apparatus comprising a cassette block and a vacuum processing block, said cassette block having a cassette table for mounting a plurality of cassettes, each containing a sample, and atmospheric transfer means for transferring a sample, said vacuum processing block having a plurality of processing chambers for performing vacuum processing on said sample, a load lock chamber on the loading side, a load lock chamber on the unloading side and vacuum transfer means for transferring said sample between said processing chamber and said load lock chambers on the loading side and the unloading side, said atmospheric transfer means transferring said sample between said cassette and both load lock chambers, wherein
- both of the shapes of said cassette block and said vacuum processing block are strictly rectangular in plan view and the relation W1−W2≧CW is satisfied, where W1 is the width of said cassette block, W2 is the width of said vacuum processing block and CW is the width of one cassette.
A vacuum processing apparatus comprising a cassette block and a vacuum processing block, said cassette block having a cassette table for mounting a plurality of cassettes, each containing a sample, and atmospheric transfer means for transferring a sample, said vacuum processing block having a plurality of processing chambers for performing vacuum processing on said sample, a load lock chamber on the loading side, a load lock chamber on the unloading side and vacuum transfer means for transferring said sample between said processing chambers and said load lock chambers on the loading side and the unloading side, said atmospheric transfer means transferring said sample between said cassette and both load lock chambers, wherein
- both of the shapes of said cassette block and said vacuum processing block are strictly rectangular in plan view and the width of said vacuum processing block is smaller than the width of said cassette block, and said vacuum processing apparatus is formed, as seen in plan view, in any one of an L-shape and a T-shape.
A vacuum processing apparatus comprising a cassette block, a vacuum processing block and atmospheric transfer means for transferring a sample between both blocks, said cassette block having a cassette table for mounting a plurality of cassettes, each containing a sample, said vacuum processing block having a plurality of processing chambers for performing vacuum processing on a sample, a load lock chamber on the loading side, a load lock chamber on the unloading side and vacuum transfer means for transferring said sample between said processing chambers and said load lock chambers on the loading side and the unloading side, said atmospheric transfer means for transferring said sample between said cassette and both load lock chambers, wherein
- both of the shapes of said cassette block and said vacuum processing block are strictly rectangular in plan view and the relation W1−W2≧CW is satisfied, where W1 is the width of said cassette block, W2 is the width of said vacuum processing block, and CW is the width of one cassette.
A vacuum processing apparatus comprising a cassette block and a vacuum processing block, said cassette block having a cassette table for mounting a plurality of cassettes, each containing a sample, said vacuum processing block having a plurality of processing chambers for performing vacuum processing on said sample, a load lock chamber on the loading side, a load lock chamber on the unloading side and vacuum transfer means for transferring said sample between said processing chambers and said load lock chambers on the loading side and the unloading side, said atmospheric transfer means for transferring said sample between said cassette and both load lock chambers, wherein
- both of the shapes of said cassette block and said vacuum processing block, as seen in plan view, are strictly rectangular, and the relation W1−W2≧CW and G1<G2 are satisfied, where W1 is the width of said cassette block, W2 is the width of said vacuum processing block, G1 is a gap between cassette blocks adjacent to each other, G2 is a gap between vacuum processing blocks adjacent to each other and CW is the width of one cassette.
A vacuum processing apparatus comprising a cassette block and a vacuum processing block, said cassette block having a cassette table for mounting a plurality of cassettes, each containing a sample, said vacuum processing block having an etching processing apparatus for performing etching processing on a sample and vacuum transfer means for transferring said sample, wherein
- both said cassette block and said vacuum processing block are strictly rectangular in plan view and the relation W1−W2≧CW is satisfied, wherein W1 is the width of said cassette block, W2 is the width of said vacuum processing block, and CW is the width of one cassette.
Dependencies are inferred from the claim text.