Method for manufacturing solar battery
AssigneesSeiko Epson Corporation, Jsr Corporation
InventorsMasahiro Furusawa, Shunichi Seki, Satoru Miyashita, Tatsuya Shimoda, Ichio Yudasaka, Yasuo Matsuki, Yasumasa Takeuchi
Life of this patent
Estimating the term…
Abstract
A solar battery is provided having a structure in which at least two semiconductor thin-films are disposed one over the other between a pair of electrodes, each semiconductor thin-film differing from the other in the impurity concentration thereof and/or the type of semiconductor. Formation of at least one of the semiconductor thin-films consists of coating a liquid coating composition containing a silicon compound so as to form a coating film and a step of converting the coating film into a silicon film by heat treatment and/or light treatment.
Claims16
A method for manufacturing a solar battery having at least two semiconductor thin-films and at least one conductive film, each of the semiconductor thin-films differing from the other in at least one of impurity concentration thereof and type of semiconductor, comprising steps of:
- a) forming at least one of the semiconductor thin-films, said step comprising:
- a sub-step of coating a liquid coating composition containing a silicon compound so as to form a coating film;
- and
- a sub-step of converting the coating film into a silicon film by at least one of heat treatment and light treatment
- b) forming at least one conductive film, said step comprising:
- a sub-step of forming a coating film on a substrate by coating a liquid material;
- and
- a sub-step of heating the coating film to convert it into a solid conductive film.
Dependencies are inferred from the claim text.