Ink jet head, manufacturing method thereof, and ink jet printing apparatus

An ink jet printing apparatus for executing printing on a printing medium using an ink jet head, said apparatus comprising:

• means for relatively scanning said ink jet head and said printing medium, and
• said ink jet head having:
• an electromagnet portion having a core provided on a substrate and a thin-film coil provided on said substrate so as to surround the core and having at least one turn;
• and
• a displacing portion located opposite the electromagnet portion, supported so as to be partially displaceable by magnetic force generated by said electromagnet portion in response to electric conduction, and for causing ink to be ejected in response to pressure resulting from the displacement.

A method of manufacturing an ink jet head, the method comprising the steps of:

• forming said core on a substrate;
• forming a thin-film coil on said substrate so as to surround said core;
• and
• disposing a displacing portion opposite said core, said displacing portion being partially displaceable by magnetic force and for causing ink to be ejected in response to pressure resulting from the displacement.

An ink jet head comprising:

• an electromagnet portion formed on a substrate;
• and
• a displacing portion located opposite the electromagnet portion, supported so as to be partially displaceable by magnetic force generated by said electromagnet portion in response to electric conduction, and for causing ink to be ejected in response to pressure resulting from the displacement, and
• wherein said electromagnet portion has a core provided on said substrate and a thin-film coil provided on said substrate so as to surround said core, said thin-film coil has a multilayered structure in which a plurality of coil patterns each having at least one turn in substantially the same plane are laminated via insulating layers, and a winding structure in which said coil patterns are sequentially connected through via hole contacts.

An ink jet printing apparatus for executing printing on a printing medium using an ink jet head, said apparatus comprising:

• means for relatively scanning said ink jet head and said printing medium, and
• said ink jet head having:
• an electromagnet portion formed on a substrate;
• and
• a displacing portion located opposite the electromagnet portion, supported so as to be partially displaceable by magnetic force generated by said electromagnet portion in response to electric conduction, and for causing ink to be ejected in response to pressure resulting from the displacement, and
• wherein said electromagnet portion has a core provided on said substrate and a thin-film coil provided on said substrate so as to surround said core, said thin-film coil has a multilayered structure in which a plurality of coil patterns each having at least one turn in substantially the same plane are laminated via insulating layers, and a winding structure in which said oil patterns are connected sequentially through via hole contacts.

A method of manufacturing an ink jet head, the method comprising the steps of:

• forming said core on a substrate;
• forming a thin-film coil by laminating a plurality of coil patterns each having at least one turn in substantially the same plane so as to surround said core are laminated via insulating layers, while sequentially connecting said coil patterns through via hole contacts;
• and
• disposing a displacing portion opposite said core, said displacing portion being partially displaceable by magnetic force and for causing ink to be ejected in response to pressure resulting from the displacement.

A method of manufacturing a thin-film coil, said method comprising the steps of:

• forming a thin-film coil main body by laminating a plurality of coil patterns each having at least one turn in substantially the same plane, while sequentially connecting said coil patterns through via hole contacts;
• forming an electrode wiring for connecting said thin-film coil with one of said external wirings on said substrate so as to be directly connected to the coil pattern of a lowermost layer facing said substrate;
• and
• forming another electrode wiring for connecting said thin-film coil main body with the other of said external wirings simultaneously with the forming step of said thin-film coil main body, by laminating a plurality of electrode layers on said substrate via insulating layers so as to connect a lowermost electrode layer facing said substrate with the other of said external wirings and to connect an uppermost electrode layer with connect the coil pattern of an uppermost layer, while sequentially connecting electrode layers through via hole contacts.