High pressure seal
AssigneeTrikon Equipments Limited
InventorsAndrew Isaac Jeffryes, Robert Kenneth Trowell
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Abstract
A seal is formed between two parts of a high pressured chamber by means of a rigid ring, which is formed with curved surfaces, that engage with an anvil and an enclosure part, the anvil having a similar curved projection. At least one of the engaging surfaces is coated with a soft metal e.g. silver.
Claims19
A high pressure chamber comprising upper and lower enclosures and a high pressure seal, wherein the high pressure seal is formed between two vertically aligned engaging parts of rigid elements which are secured to the upper and lower enclosures, and wherein the high pressure seal includes a coating of a noble metal over a contact surface of at least one of the engaging parts, and means for urging the vertically aligned engaging parts into direct contact with each other in a vertical direction only, wherein the high pressure seal is devoid of a separate gasket between the engaging parts when the engaging parts are in direct contact with each other wherein the upper and lower enclosures define a semiconductor materials processing chamber, and wherein at least one of the engaging parts has a curved contact surface.
Dependencies are inferred from the claim text.