Micro-electro-mechanical gyroscope

A gyroscope comprising:

• a substrate having a surface, said substrate being comprised of piezoelectric material;
• a first resonator transducer disposed on said surface, for creating a first surface acoustic wave on said surface;
• a pair of reflectors disposed on said surface, for reflecting said first surface acoustic wave to form a standing wave within a first region of said surface between said pair of reflectors;
• a structure disposed on said surface within said first region, wherein a Coriolis force acting upon said structure creates a second surface acoustic wave;
• a first sensor transducer disposed on said surface for sensing said second surface acoustic wave and providing an output indicative thereof,
• a second resonator transducer disposed on said surface for creating a third surface acoustic wave on said surface;
• a second pair of reflectors disposed on said surface for reflecting said third surface acoustic wave to form a second standing wave within a second region of said surface between said second pair of reflectors, wherein said second region is free of any structure that said Coriolis force can act upon;
• and
• a second sensor transducer disposed on said surface for sensing a residual surface acoustic wave from said second region, and providing an output indicative thereof;
• wherein a difference between said output of said first sensor transducer and said second sensor transducer is processed to characterize said Coriolis force.

A gyroscope comprising:

• a piezoelectric substrate having a surface;
• a resonator disposed on said surface for creating a first surface acoustic wave within a region of said surface;
• a structure disposed on said surface within said region for oscillating in response to said first surface acoustic wave, wherein a Coriolis force acting upon said structure creates a second surface acoustic wave;
• a sensor disposed on said surface for sensing said second surface acoustic wave and providing an output indicative thereof;
• and
• an antenna for receiving a first signal from an external transmitter for initiating an oscillation of said resonator, and for transmitting a second signal derived from said output of said sensor to an external receiver.