System for and method of preparing manufacturing process specifications and production control system

A method of preparing manufacturing-process specifications, comprising:

• controlling actual manufacturing processes of apparatuses by use of process data;
• collecting quality control data measured through actual manufacturing processes;
• executing a simulation by use of said process data and a simulation parameter;
• collecting a simulation result;
• storing said process data including process name and process condition for a target device to be manufactured by each manufacturing process, each piece of said process data having unique identification and serving as input data to be directly inputted to and used to activate both a production control system a simulation system for a specific manufacturing process;
• updating said process data by using both of the quality control data and the simulation result;
• and
• providing the updated process data to a subsequent actual manufacturing process and simulation process,
• wherein the entire process data is accumulated within a unified database so as to eliminate data conversion between said production control system and said simulation system.

A system for preparing manufacturing-process specifications, comprising:

• a production control system configured to control actual manufacturing processes of apparatuses by use of process data and collecting quality control data measured through actual manufacturing processes;
• a first database configured to store process specification data derived from said process data for use in said production control system;
• a simulation system configured to execute a simulation by use of said process data and a simulation parameter and collecting a simulation result;
• a second database configured to store simulation data derived from said process data for use in said simulation system;
• a third database configured to store said process data including process name and process condition for a target device to be manufactured by each manufacturing process, each piece of said process data having unique identification and serving as input data to be directly inputted to and used to activate both of said production control system, and said simulation system for a specific manufacturing process;
• and
• a shared data preparing system configured to update said process data by using both of the quality control data and the simulation result and providing the updated process data to subsequent actual manufacturing process and simulation process,
• wherein entire process data is accumulated within a unified database so as to eliminate data conversion between said production control system and said simulation system.

A system for preparing manufacturing-process specifications, comprising:

• a production control system configured to control actual manufacturing processes of apparatuses by use of process data;
• a simulation system configured to simulate the manufacturing processes by use of said process data and a simulation parameter;
• a database configured to store said process data including process name and process condition for a target device to be manufactured by each manufacturing process, each piece of said process data having unique identification and serving as input data to be directly inputted to and used to activate both, of said production control system and said simulation system for a specific manufacturing process, wherein said database comprises,
• a first data section dedicated to the actual manufacturing process,
• a second data section dedicated to the simulation process, and
• a common data section containing said process data, and
• a process data search system configured to search desired process data, wherein a data item stored in the first or second data section is indexed and searched by at least one of said process name and said process condition stored in the common data section.

A system for preparing manufacturing-process specifications, comprising:

• a production control system configured to control actual manufacturing processes of apparatuses by use of process data and collecting quality control data measured through actual manufacturing processes;
• a simulation system configured to execute a simulation by use of said process data and a simulation parameter and collecting a simulation result;
• a database configured to store said process data including process name and process condition for a target device to be manufactured by each manufacturing process, each piece of said process data having unique identification and serving as input data to be directly inputted to and used to activate both of said production control system and said simulation system for a specific manufacturing process;
• a shared data preparing system configured to update said process data by using both of the quality control data and the simulation result and providing the updated process data to a subsequent actual manufacturing process and a simulation process;
• and
• a retrieval unit configured to retrieve a desired piece of process information for a certain manufacturing process to be inputted into at least one of said production control system and said simulation system by use of process flow data inputted through an input device, said process flow data being generated from said process name and process condition and prepared by specifying an execution sequence of a plurality of processes,
• wherein the entire process data is accumulated within a unified database so as to eliminate data conversion between said production control system and said simulation system.