Gas purification system and method

A gas purification system, comprising:

• a purifier line having a gas inlet at one end for connection to a supply of a gas mixture comprising a carrier gas and an inorganic dopant gas which is to be purified of contaminants and a process outlet at an opposite end for connection to a process tool using the purified gas mixture;
• a purifier for purifying the gas mixture connected in the purifier line between the inlet and the outlet, the purifier having an inlet end and an outlet end;
• a vent line connected to the outlet end of the purifier and having a vent outlet;
• a vent control valve in the vent line for controlling connection of the purifier outlet to the vent outlet;
• and
• a process outlet valve in the purifier line for controlling connection of the purifier outlet to the process outlet;
• whereby said gas mixture is purified of said contaminants without significant deterioration in the concentration of said dopant gas in said mixture.

A gas purification system, comprising:

• a plurality of purifier lines, each having a gas inlet at one end for connection to a supply of one gas mixture of a plurality of different gas mixtures, each gas mixture comprising a carrier gas and a dopant gas, said one gas mixture to be purified of contaminants, and a process outlet at an opposite end for connection to a process tool using the purified gas mixture;
• a predetermined purifier in each purifier line for removing contaminants from the gas mixture in said line, at least one of said plurality of purifier lines having a vent line connecting the purifier outlet in said line to a vent outlet in said vent line;
• a vent control valve in the vent line for controlling connection of the purifier outlet to the vent outlet;
• and
• a process outlet valve in the purifier line for controlling connection of the purifier to process outlet;
• whereby each said gas mixture is purified of said contaminants without significant deterioration in concentration of said dopant gas in said mixture.

A gas purification system for supplying several different purified gases to a tool, comprising:

• a plurality of separate purifier lines each having an inlet for connection to a predetermined gas supply and an outlet for connection to a process tool;
• a predetermined purifier connected in each purifier line for purifying the gas supplied along the purifier line;
• at least some of the purifier lines having a vent line connected to the purifier outlet;
• a vent outlet connected to each vent line for venting gas from the respective purifier;
• a vent control valve in each vent line for controlling purifier outlet connection to the vent outlet;
• a process outlet control valve in each purifier line for controlling purifier outlet connection to the process outlet;
• and
• a system controller for controlling operation of the vent control valves and process outlet control valves, whereby each purifier connected to a vent line is connected to the vent outlet for a predetermined time period on start up of the system sufficient for the purifier to be conditioned, and the purifier is connected to the process outlet when conditioning is complete.