Carrier system positioning method
AssigneeTokyo Electron Limited
InventorsYasuhiko Nishinakayama, Shigeru Ishizawa, Hiroaki Saeki, Takashi Kawano, Tetsu Osawa
Life of this patent
Estimating the term…
Loading patent…
AssigneeTokyo Electron Limited
InventorsYasuhiko Nishinakayama, Shigeru Ishizawa, Hiroaki Saeki, Takashi Kawano, Tetsu Osawa
Estimating the term…
The invention is a method for positioning a conveying mechanism having a holding portion for semiconductor wafers. Respective provisional position coordinates of an orienting teaching standard position and a container teaching standard positions are inputted into a controlling unit in advance. A wafer to be conveyed precisely positioned with respect to and held by the holding portion is conveyed and placed on the rotating orienting device according a control based on the provisional coordinates of the orienting teaching standard position. A posture detector then detects the eccentric volume and eccentric direction of the wafer. Appropriate position coordinates are made by amending the provisional coordinates. Then, a wafer to be conveyed precisely positioned with respect to the container teaching standard position is conveyed and placed on the rotating orienting device according a control based on the provisional coordinates of the orienting teaching standard position. A posture detector then detects the eccentric volume and eccentric direction of the wafer. Appropriate position coordinates are made by amending the provisional coordinates.
A method for positioning a conveying system including;
Dependencies are inferred from the claim text.