System for inspecting and/or processing a sample
AssigneeAdvantest Corporation
InventorsShinpei Takeshita, Jurgen Frosien
Life of this patent
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Abstract
A system for inspecting and/or processing a sample on a stage with a probe or imaging apparatus, the probe or imaging apparatus is defined by an optical column having beam generating means and means to deflect the beam, the position of the stage relatively to the probe or imaging apparatus being controlled by position control means. The position control means comprises gyroscopic means fixed to the stage and/or the probe or imaging apparatus and is operatively connected with the deflection means in order to compensate unintentional movements of the stage relatively to the column.
Claims7
A system for inspecting and/or processing a sample on a stage, comprising:
- a probe or imaging apparatus defined by an optical column having beam generating means and means to deflect the beam;
- and
- position control means for controlling a position of the stage relatively to the probe or imaging apparatus;
- wherein the position control means comprises gyroscopic means fixed to the stage and/or the probe or imaging apparatus and is operatively connected with the deflection means in order to compensate unintentional movements of the stage relatively to the column.
A system for inspecting and/or processing a sample on a stage, comprising:
- a probe or imaging apparatus defined by an optical column having beam generating means, means to deflect the beam and image processing means;
- and
- position control means for controlling a position of the stage relatively to the probe or imaging apparatus;
- wherein the position control means comprises gyroscopic means fixed to the stage and/or the probe or imaging apparatus and is operatively connected with the image processing means in which the unintentional movements of the stage relatively to the column will be taken into account when processing the image.
Dependencies are inferred from the claim text.