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US 6,506,009 B1Granted
Apparatus for storing and moving a cassette
AssigneeApplied Materials, Inc.
InventorsJaim Nulman, Nissim Sidi
Life of this patent
Estimating the term…
Abstract
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette mover to carry a cassette between the shelves and the docking stations. An interstation transfer apparatus includes a support beam and a transfer arm adapted to carry a cassette between processing stations.
Claims20
An apparatus for storing cassettes, comprising:
- two or more vertically disposed docking stations, each docking station including structure adapted to support a cassette;
- a first plurality of cassette storage shelves arranged in a vertical column positioned vertically relative to the docking stations;
- a second plurality of cassette storage shelves arranged in a vertical column and separated by a vertical channel from the first plurality of cassette storage shelves, the vertical channel being sized to permit movement of a cassette therethrough in a vertical direction;
- structure adapted to support the first and second pluralities of cassette storage shelves;
- a loading platform positioned vertically below the vertical channel;
- a cassette mover having a support member positioned adjacent the shelves and movable in a path generally parallel to the shelves to carry a cassette between the shelves and the two or more docking stations, the cassette mover including a mechanism adapted to impart movement to the cassette mover;
- and
- an end effector movably connected to the support member and configured to engage a cassette by moving in at least one of a horizontal direction and a vertical direction.
5 more elements
An apparatus for storing cassettes, comprising:
- a first plurality of cassette storage shelves positioned adjacent a wall and arranged in a vertical column positioned vertically above a plurality of vertically disposed cassette docking stations, each docking station including structure adapted to support a cassette;
- a second plurality of cassette storage shelves arranged in a vertical column and separated by a vertical channel from the first plurality of cassette storage shelves, the vertical channel being sized to permit movement of a cassette therethrough in a vertical direction;
- structure adapted to support the first and second pluralities of cassette storage shelves;
- a loading platform positioned vertically below the vertical channel;
- and
- a cassette mover adapted to carry a cassette between the shelves and the docking stations, the cassette mover including a support member positioned adjacent the shelves and movable in a plane parallel to the wall, a mechanism adapted to impart movement to the cassette mover, and an end effector configured to engage a cassette by moving in at least one of a horizontal direction and a vertical direction, the end effector slidably connected to the support member.
3 more elements
An apparatus for storing cassettes, comprising:
- a first plurality of vertically disposed docking stations, the docking stations of the first plurality each including structure adapted to support a cassette;
- a second plurality of vertically disposed docking stations, the docking stations of the second plurality each including structure adapted to support a cassette;
- a first plurality of cassette storage shelves arranged in a vertical column positioned vertically relative to the first plurality of docking stations;
- a second plurality of cassette storage shelves arranged in a vertical column positioned vertically relative to the second plurality of docking stations;
- structure adapted to support the first and second pluralities of cassette storage shelves;
- a cassette mover to carry a cassette between the shelves and the docking stations, the cassette mover having
- a support member disposed adjacent the shelves and movable in a path generally parallel to the shelves, the cassette mover including a mechanism adapted to impart movement to the cassette mover;
- and
- an end effector movably connected to the support member and configured to engage a cassette by moving in at least one of a horizontal direction and a vertical direction.
6 more elements
An apparatus for storing cassettes, comprising:
- a plurality of vertically disposed cassette docking stations, each docking station including structure adapted to support a cassette;
- a plurality of cassette storage shelves positioned adjacent a wall and arranged in a vertical column positioned vertically above the docking stations;
- structure adapted to support the plurality of cassette storage shelves;
- and
- a cassette mover adapted to carry a cassette between the shelves and the docking stations, the cassette mover including a support member positioned adjacent the shelves and movable in a plane parallel to the wall, a mechanism adapted to impart movement to the cassette mover, and an end effector configured to engage a cassette by moving in at least one of a horizontal direction and a vertical direction, the end effector slidably connected to the support member;
- wherein an upper one of the vertically disposed docking stations comprises a door adapted to open upwardly, and a lower one of the vertically disposed docking stations comprises a door adapted to open downwardly.
3 more elements
An apparatus for storing cassettes, comprising:
- a first plurality of vertically disposed docking stations, the docking stations of the first plurality each including structure adapted to support a cassette;
- a second plurality of vertically disposed docking stations, the docking stations of the second plurality each including structure adapted to support a cassette;
- a first cassette storage shelf positioned vertically above the first plurality of docking stations;
- a second cassette storage shelf positioned vertically above the second plurality of docking stations;
- structure adapted to support the first and second pluralities of cassette storage shelves;
- a cassette mover to carry a cassette between the shelves and the docking stations, the cassette mover having a support member disposed adjacent the shelves and movable in a path generally parallel to the shelves, the cassette mover including a mechanism adapted to impart movement to the cassette mover;
- and
- an end effector movably connected to the support member and configured to engage a cassette by moving in at least one of a horizontal direction and a vertical direction.
5 more elements
Dependencies are inferred from the claim text.