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AssigneeUnaxis Balzers Aktiengesellschaft
InventorsEmmanuel Turlot, Jean-Baptiste Chevrier, Jacques Schmitt, Jean Barreiro
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A plasma reactor has a reactor vessel and a pair of electrodes in the form of spaced apart and oppositely disposed metallic surfaces defining therebetween a plasma discharge space. At least one of the metallic surfaces is the surface of a metallic plate having a plurality of gas feed openings extending through the metallic surface towards said discharge space and from a distribution chamber extending along the plate opposite the discharge space. The distribution chamber has a wall opposite and distant from the plate and includes a gas inlet arrangement with a plurality of gas inlet openings distributed along the wall and connected to one or more gas feed lines to the reactor. A gas flow resistant coefficient between the one or more gas feed lines and at least a predominant portion of the connected inlet openings are at least substantially equal.
A plasma reactor, comprising a reactor vessel and a pair of electrodes arranged in the reactor vessel and having spaced apart and oppositely disposed metallic surfaces defining therebetween a plasma discharge space, at least one of said metallic surfaces being the surface of a metallic plate having a multitude of gas feed openings therethrough and through said metallic surface towards said discharge space and from a distribution chamber extending along said plate opposite said discharge space;
A plasma reactor, comprising a reactor vessel and a pair of electrodes arranged in said reactor vessel and having spaced apart and oppositely disposed metallic surfaces defining therebetween a plasma discharge space, at least one of said metallic surfaces being the surface of a metallic plate having a multitude of gas feed openings therethrough and through said metallic surface towards said discharge space and from a distribution chamber extending along said plate, said distribution chamber having opposite said discharge space, a wall distant from said plate and comprising a gas inlet arrangement with a multitude of gas inlet openings distributed along said wall and connected to at least one gas feed line to the reactor, at least a part of said gas feed openings through said plate cooperating with removable flow-resistance increasing inserts.
A plasma reactor, comprising a reactor vessel and a pair of electrodes arranged in said reactor vessel and comprising spaced apart and oppositely disposed metallic surfaces defining therebetween a plasma discharge space, at least one of said metallic surfaces being the surface of a plate having a multitude of gas feed openings therethrough and through said metallic surface towards said discharge space and from a distribution chamber extending along said plate opposite said discharge space, said distribution chamber having a wall with a metallic surface opposite and distant from said plate, said metallic surface of said wall being mutually electrically isolated from said metallic surface of said metallic plate and further comprising a gas inlet arrangement with a multitude of gas inlet openings distributed along said wall and connected to at least one gas feed line to the reactor.
Dependencies are inferred from the claim text.