Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions

A method for abatement of effluent from a CVD process for depositing BST on a substrate from a precursor composition including barium, strontium and titanium metalorganic source reagents, wherein organic solvent is contained in the precursor composition and/or employed as a flush medium in the CVD process, and organic solvent correspondingly is present in effluent from the CVD process, said method comprising flowing organic solvent-containing and oxidant gas-containing effluent from the CVD process in sequence through a metals trap, a motive fluid driver, and at least one sorbent bed having sorptive affinity for organic species, to remove organic species from the effluent, wherein the sorbent bed comprises a regenerated carbon sorbent comprising an oxidizing material selected from the group consisting of permanganates and metal oxides.

A method for abatement of effluent from a multi-component metal oxide CVD process using a metal source reagent liquid solution comprising at least one metal coordination complex including a metal to which is coordinatively bound at least one ligand in a stable complex and a suitable solvent medium for that metal coordination complex, said method comprising flowing the effluent from the multi-component metal oxide CVD process through a regenerated carbon sorbent bed having sorptive affinity for organic and metalorganic species in the effluent, wherein said regenerated carbon sorbent bed comprises an oxidizing material selected from the group consisting of permanganates and metal oxides.

A method for abatement of effluent from a multi-component metal oxide CVD process using a metal source reagent liquid solution comprising at least one metal coordination complex including a metal to which is coordinatively bound at least one ligand in a stable complex and a suitable solvent medium for that metal coordination complex, said method comprising flowing solvent-containing effluent from the CVD process in sequence through a metals trap, a motive fluid driver, and a regenerated carbon sorbent bed having sorptive, affinity for organic species, to remove organic species from the effluent, wherein said regenerated carbon sorbent bed comprises a material selected from the group consisting of permanganates and metal oxides.

A method for abatement of effluent from a CVD process for depositing a multi-component metal oxide film on a substrate from corresponding source reagent(s), said method comprising flowing an effluent from a CVD process comprising waste gases including an inert gas, oxidant gas, and a precursor vapor mixture through at least one sorbent bed having sorptive affinity for organic and metalorganic species in the effluent, wherein the sorbent bed comprises a regenerated carbon sorbent comprising potassium permanganate.

A method for abatement of effluent from a CVD process for depositing a multi-component metal oxide film on a substrate from corresponding source reagent(s), said method comprising flowing an effluent from a CVD process comprising waste gases including an inert gas, oxidant gas, and a precursor vapor mixture through a two-zone sorbent unit, wherein said two-zone sorbent unit comprises a first sorbent bed comprising alumina, and a second sorbent bed comprising regenerated activated carbon that comprises potassium permanganate.