Fluid storage and dispensing system featuring ex-situ strain gauge pressure monitoring assembly

A fluid containment system, comprising:

• a closed, sealed vessel adapted to be removably coupled with a fluid-using process unit, said vessel being constructed and arranged to retain a fluid therein, with means joined to the vessel for selectively dispensing fluid from the vessel to the process unit for use in said unit, with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted;
• said vessel including a vessel wall with an interior surface in contact with the fluid contained in the vessel, and an exterior surface;
• and
• a pressure monitor including a strain-responsive sensor disposed on the exterior surface of said vessel, for generating a pressure-indicative response correlative of pressure of fluid in the vessel, whereby pressure can be monitored as fluid is discharged from the vessel and pressure of the fluid in the vessel correspondingly changes with such discharge,
• wherein said strain-responsive sensor comprises an electrical resistance stain gauge assembly comprising one or more strain-gauge grids, wherein each of said one or more strain-measuring grids comprises a layer of conductive material, and wherein said conductive material comprises metal or metal alloy.

A fluid containment system, comprising:

• a closed, sealed vessel adapted to be removably coupled with a fluid-using process unit, said vessel being constructed and arranged to retain a fluid therein, with means joined to the vessel for selectively dispensing fluid from the vessel to the process unit for use in said unit, with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted;
• said vessel including a vessel wall with an interior surface in contact with the fluid contained in the vessel, and an exterior surface;
• and
• a pressure monitor including a strain-responsive sensor disposed on the exterior surface of said vessel, for generating a pressure-indicative response correlative of pressure of fluid in the vessel, wherein pressure can be monitored as fluid is discharged from the vessel and pressure of the fluid in the vessel correspondingly changes with such discharge,
• wherein the strain-responsive sensor comprises an electrical resistance strain gauge assembly that comprises one or more strain-measuring grids, and wherein each of said one or more strain-measuring grids comprises a layer of conductive material and a layer of base material underneath said layer of conductive material, and wherein the base material is temperature-resistant and elastic.

A fluid containment system, comprising:

• a closed, sealed vessel adapted to be removably coupled with a fluid-using process unit, said vessel being constructed and arranged to retain a fluid therein, with means joined to the vessel for selectively dispensing fluid from the vessel to the process unit for use in said unit, with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted;
• said vessel including a vessel wall with an interior surface in contact with the fluid contained in the vessel, and an exterior surface;
• and
• a pressure monitor including a strain-responsive sensor disposed on the exterior surface of said vessel, for generating a pressure-indicative response correlative of pressure of fluid in the vessel, wherein pressure can be monitored as fluid is discharged from the vessel and pressure of the fluid in the vessel correspondingly changes with such discharge,
• wherein the pressure monitor comprises an audible output display.

A fluid containment system, comprising:

• a closed, sealed vessel adapted to be removably coupled with a fluid-using process unit, said vessel being constructed and arranged to retain a fluid therein, with means joined to the vessel for selectively dispensing fluid from the vessel to the process unit for use in said unit, with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted;
• said vessel including a vessel wall with an interior surface in contact with the fluid contained in the vessel, and an exterior surface;
• and
• a pressure monitor including a strain-responsive sensor disposed on the exterior surface of said vessel, for generating a pressure-indicative response correlative of pressure of fluid in the vessel, wherein pressure can be monitored as fluid is discharged from the vessel and pressure of the fluid in the vessel correspondingly changes with such discharge,
• wherein the pressure monitor is constructed and arranged for continuous monitoring of pressure.

A fluid containment system, comprising:

• a closed, sealed vessel adapted to be removably coupled with a fluid-using process unit, said vessel being constructed and arranged to retain a fluid therein, with means joined to the vessel for selectively dispensing fluid from the vessel to the process unit for use in said unit, with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted;
• said vessel including a vessel wall with an interior surface in contact with the fluid contained in the vessel, and an exterior surface;
• and
• a pressure monitor including a strain-responsive sensor disposed on the exterior surface of said vessel, for generating a pressure-indicative response correlative of pressure of fluid in the vessel, wherein pressure can be monitored as fluid is discharged from the vessel and pressure of the fluid in the vessel correspondingly changes with such discharge,
• wherein the pressure monitor is constructed and arranged for intermittent monitoring of pressure.

A fluid containment system, comprising:

• a closed, sealed vessel adapted to be removably coupled with a fluid-using process unit, said vessel being constructed and arranged to retain a fluid therein, with means joined to the vessel for selectively dispensing fluid from the vessel to the process unit for use in said unit, with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted;
• said vessel including a vessel wall with an interior surface in contact with the fluid contained in the vessel, and an exterior surface;
• and
• a pressure monitor including a strain-responsive sensor disposed on the exterior surface of said vessel, for generating a pressure-indicative response correlative of pressure of fluid in the vessel, wherein pressure can be monitored as fluid is discharged from the vessel and pressure of the fluid in the vessel correspondingly changes with such discharge,
• wherein the pressure monitor is constructed and arranged for remote outputting of pressure monitoring data.

A fluid containment system, comprising:

• a closed, sealed vessel adapted to be removably coupled with a fluid-using process unit, said vessel being constructed and arranged to retain a fluid therein, with means joined to the vessel for selectively dispensing fluid from the vessel to the process unit for use in said unit, with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted;
• said vessel including a vessel wall with an interior surface in contact with the fluid contained in the vessel, and an exterior surface;
• and
• a pressure monitor including a strain-responsive sensor disposed on the exterior surface of said vessel, for generating a pressure-indicative response correlative of pressure of fluid in the vessel, wherein pressure can be monitored as fluid is discharged from the vessel and pressure of the fluid in the vessel correspondingly changes with such discharge, wherein the pressure monitor is disposed on the exterior surface of the vessel at a location where the vessel has a lowest wall thickness.

A fluid containment system, comprising:

• a closed, sealed vessel adapted to be removably coupled with a fluid-using process unit, said vessel being constructed and arranged to retain a fluid therein, with means joined to the vessel for selectively dispensing fluid from the vessel to the process unit for use in said unit, with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted;
• said vessel including a vessel wall with an interior surface in contact with the fluid contained in the vessel, and an exterior surface;
• and
• a pressure monitor including a strain-responsive sensor disposed on the exterior surface of said vessel, for generating a pressure-indicative response correlative of pressure of fluid in the vessel, wherein pressure can be monitored as fluid is discharged from the vessel and pressure of the fluid in the vessel correspondingly changes with such discharge,
• wherein the pressure monitor is mounted to the exterior surface of the vessel by an adhesive material.

A fluid storage and dispensing apparatus, comprising:

• a closed, sealed fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid discharge port for discharging fluid from the vessel;
• a pressure regulating element in the interior volume of the fluid storage and dispensing vessel, arranged to flow fluid therethrough to the fluid discharge port at a set pressure for dispensing thereof;
• and
• a pressure monitor including a strain-responsive sensor disposed on an exterior surface of said vessel, for generating a pressure-indicative response correlative of pressure of fluid in the vessel, whereby pressure can be monitored as fluid is discharged from the vessel and pressure of the fluid in the vessel correspondingly changes with such discharge.

A method of monitoring pressure of a fluid in a vessel during use or operation involving discharge of fluid from the vessel, wherein said vessel comprises a closed, sealed fluid storage and dispensing vessel adapted to be removably coupled with a fluid-using process unit, with means joined to the vessel for selectively dispensing fluid from the vessel to the fluid-using process unit for use therein, and with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted, said method comprising:

• sensing strain of a wall of said vessel;
• and
• generating an output indicative of pressure of the fluid in the vessel correlative to the sensed strain of said wall of said vessel,
• wherein the step of sensing strain of a wall of the vessel comprises disposing on an exterior surface of the wall of the vessel an electrical resistance strain gauge assembly that comprises one or more strain-measuring grids, wherein said strain-measuring grid comprises a layer of conductive material, and wherein said conductive material comprises metal or metal alloy.

A method of monitoring pressure of a fluid in a vessel during use or operation involving discharge of fluid from the vessel, wherein said vessel comprises a closed, sealed fluid storage and dispensing vessel adapted to be removably coupled with a fluid-using processing unit, with means joined to the vessel for selectively dispensing fluid from the vessel to the fluid-using process unit for use therein, and with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted, said method comprising:

• sensing strain of a wall of said vessel;
• and
• generating an output indicative of pressure of the fluid in the vessel correlative to the sensed strain of said wall of said vessel,
• wherein said output is audibly outputted.

A method of monitoring pressure of a fluid in a vessel during use or operation involving discharge of fluid from the vessel, wherein said vessel comprises a closed, sealed fluid storage and dispensing vessel adapted to be removably coupled with a fluid-using processing unit, with means joined to the vessel for selectively dispensing fluid from the vessel to the fluid-using process unit for use therein, and with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted, said method comprising:

• sensing strain of a wall of said vessel;
• and
• generating an output indicative of pressure of the fluid in the vessel correlative to the sensed strain of said wall of said vessel,
• wherein the pressure of the fluid is continuously monitored.

A method of monitoring pressure of a fluid in a vessel during use or operation involving discharge of fluid from the vessel, wherein said vessel comprises a closed, sealed fluid storage and dispensing vessel adapted to be removably coupled with a fluid-using processing unit, with means joined to the vessel for selectively dispensing fluid from the vessel to the fluid-using process unit for use therein, and with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted, said method comprising:

• sensing strain of a wall of said vessel;
• and
• generating an output indicative of pressure of the fluid in the vessel correlative to the sensed strain of said wall of said vessel,
• wherein the pressure of the fluid is intermittently monitored.

A method of monitoring pressure of a fluid in a vessel during use or operation involving discharge of fluid from the vessel, wherein said vessel comprises a closed, sealed fluid storage and dispensing vessel adapted to be removably coupled with a fluid-using processing unit, with means joined to the vessel for selectively dispensing fluid from the vessel to the fluid-using process unit for use therein, and with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted, said method comprising:

• sensing strain of a wall of said vessel;
• and
• generating an output indicative of pressure of the fluid in the vessel correlative to the sensed strain of said wall of said vessel,
• wherein the output indicative of pressure of the fluid is remotely transmitted.

A method of monitoring pressure of a fluid in a vessel during use or operation involving discharge of fluid from the vessel, wherein said vessel comprises a closed, sealed fluid storage and dispensing vessel adapted to be removably coupled with a fluid-using process unit, with means joined to the vessel for selectively dispensing fluid from the vessel to the fluid-using process unit for use therein, and with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted, said method comprising:

• sensing strain of a wall of said vessel;
• and
• generating an output indicative of pressure of the fluid in the vessel correlative to the sensed strain of said wall of said vessel,
• wherein the step of sensing strain of a wall of the vessel comprises disposing on an exterior surface of the wall of the vessel an electrical resistance strain gauge assembly, at a location where said wall has a lowest wall thickness.

A method of monitoring pressure of a fluid in a vessel during use or operation involving discharge of fluid from the vessel, wherein said vessel comprises a closed, sealed fluid storage and dispensing vessel adapted to be removably coupled with a fluid-using process unit, with means joined to the vessel for selectively dispensing fluid from the vessel to the fluid-using process unit for use therein, and with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted, said method comprising:

• sensing strain of a wall of said vessel;
• and
• generating an output indicative of pressure of the fluid in the vessel correlative to the sensed strain of said wall of said vessel,
• wherein the step of sensing strain of a wall of the vessel comprises mounting onto an exterior surface of the wall of the vessel an electrical resistance strain gauge assembly, using an adhesive material.

A method of fluid management, comprising:

• confining a fluid in a closed, sealed, fluid storage and dispensing vessel adapted to be removably coupled with a fluid-using process unit, said vessel including a vessel wall enclosing an interior volume for holding the fluid, wherein the vessel includes a fluid discharge port for discharging fluid from the vessel, and a pressure regulating element in the interior volume of the fluid storage and dispensing vessel, arranged to flow fluid therethrough to the fluid discharge port at a set pressure for dispensing thereof, with means joined to the fluid discharge port for selectively dispensing fluid to the fluid-using process unit for use therein, with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted;
• sensing strain of said vessel wall;
• and
• generating an output indicative of pressure of the fluid in the vessel correlative to the sensed strain of said vessel wall.

A fluid confinement system, comprising:

• a fluid confinement structure comprising a closed, sealed fluid storage and dispensing vessel adapted to be removably coupled with a fluid-using process unit, said vessel including a vessel wall enclosing an interior volume for holding the fluid, wherein the vessel includes a fluid discharge port for discharging fluid from the vessel, with means joined to the fluid discharge port for selectively dispensing fluid to the fluid-using process unit for use therein, with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted;
• said wall having a first surface in contact with the fluid, and a second surface not in contact with the fluid, said second surface being separated from the first surface by a wall thickness therebetween;
• and
• a pressure monitor including a strain-responsive sensor disposed on said second surface of said wall and arranged to output a response correlative to pressure of the fluid in contact with the first surface of said wall.

A fluid storage and delivery system, comprising:

• a closed, sealed fluid storage and dispensing vessel adapted to be removably coupled with a fluid-using semiconductor manufacturing process unit, said vessel being constructed and arranged to retain a fluid therein for use in said semiconductor manufacturing process unit, with a valve head on the vessel and a flow control valve in the valve head, for selectively dispensing fluid from the vessel to the process unit for use in said process unit, with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted;
• said vessel including a vessel wall with an interior surface in contact with the fluid contained in the vessel, and an exterior surface;
• a fluid regulator assembly internally disposed in said vessel so that fluid dispensed from the vessel flows through the regulator assembly prior to flow through said flow control valve;
• and
• a pressure monitor including a strain-responsive sensor disposed on the exterior surface of said vessel, for generating a pressure-indicative response correlative of pressure of fluid in the vessel, whereby pressure can be monitored as fluid is discharged from the vessel and pressure of the fluid in the vessel correspondingly changes with such discharge;
• said strain-responsive sensor comprising a bridge circuit including a plurality of measuring grids, comprising a first measuring grid mounted to the exterior surface of said vessel so as to be subject to both strain and temperature changes of the vessel wall, and at least one other measuring grid mounted to the exterior surface of said vessel so as to be (i) subject to the same temperature changes of the vessel wall as the first measuring grid but (ii) not subject to strain changes of the vessel wall, whereby the first measuring grid exhibits a resistance change due to temperature change that is compensated by resistance change of said at least one other measuring grid, but whereby resistance change of the first measuring grid caused by true strain is not affected by said at least one other measuring grid, and whereby the pressure-indicative response of said strain-responsive sensor reflects only change due to true strain changes of the vessel wall.

A fluid storage and delivery system, comprising:

• a closed, sealed fluid storage and dispensing vessel adapted to be removably coupled with a fluid-using semiconductor manufacturing process unit, said vessel being constructed and arranged to retain a fluid therein for use in said semiconductor manufacturing process unit, with a valve head on the vessel and a flow control valve in the valve head, for selectively dispensing fluid from the vessel to the process unit for use in said process unit, with said vessel being
• adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted;
• said vessel including a vessel wall with an interior surface in contact with the fluid contained in the vessel, and an exterior surface;
• a fluid regulator assembly internally disposed in said vessel so that fluid dispensed from the vessel flows through the regulator assembly prior to flow through said flow control valve;
• and
• a pressure monitor assembly disposed on the exterior surface of said vessel, said pressure monitor assembly including a strain-responsive sensor for sensing strain indicative of pressure of fluid in the vessel, and a display module operatively coupled to the strain-responsive sensor for providing a corresponding pressure output, whereby pressure can be monitored as fluid is discharged from the vessel and pressure of the fluid in the vessel correspondingly changes with such discharge.