Non-contact mechanical resonance method for determining the near surface carrier mobility in conductors
AssigneesThe Board of Trustees of the Leland Stanford Junior University, International Business Machines Corporation
InventorsTimothy D. Stowe, Daniel Rugar, Thomas W. Kenny
Life of this patent
Estimating the term…
Abstract
An apparatus using a resonator probe for determining an electronic property of a conductor across a dielectric. The apparatus has a device for inducing lateral mechanical oscillations of the resonator probe and a voltage source for producing a voltage difference between the resonator probe and the conductor to create an electronic drag between the conductor and resonator probe, thus damping the mechanical oscillations of the probe. The electronic property, such as charge carrier mobility, surface resistance, charge carrier lifetime and the number of charge carriers is determined from the damping experienced by the probe.
Claims19
An apparatus for determining an electronic property of a conductor across a dielectric, said apparatus comprising:
- a) a resonator probe for positioning a predetermined distance from said conductor;
- b) a means for inducing lateral mechanical oscillations in said resonator probe;
- c) a voltage source for producing a voltage difference between said resonator probe and said conductor to create an electronic drag between said conductor and said resonator probe, thereby causing a damping of said lateral mechanical oscillations;
- and
- d) a means for determining said electronic property from said damping.
A method for determining an electronic property of a conductor across a dielectric, said method comprising:
- a) positioning a resonator probe a predetermined distance away from said conductor;
- b) inducing lateral mechanical oscillations in said resonator probe;
- c) producing a voltage difference between said resonator probe and said conductor such that an electronic drag is created between said conductor and said resonator probe, thereby causing a damping of said lateral mechanical oscillations;
- and
- d) determining said electronic property from said damping.
Dependencies are inferred from the claim text.