Method and apparatus for separating non-metallic materials
AssigneeApplied Photonics, Inc.
InventorsBrian Hoekstra, Roger Flannigan, Daniel Wegerif
Life of this patent
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Abstract
A method and apparatus for splitting non-metallic substrates includes a laser for generating a laser beam. An integrated cracking devices receives the laser beam and directs the laser beam onto a non-metallic substrate to define the heat affected zone and quench the substrate at a quenching region contained within the heat affected zone. This integrated cracking device includes a housing and optics fitted within the housing for receiving and directing the laser beam onto the substrate. A quenching nozzle is mounted on the housing for quenching the substrate at a quenching region defined within the heat affected zone.
Claims17
An apparatus for splitting non-metallic substrates comprising:
- a laser for generating a laser beam;
- an integrated cracking device for receiving the laser beam and directing the laser beam onto a non-metallic substrate to define a heat affected zone and quenching the substrate at a quenching region contained within the heat affected zone, said integrated cracking device comprising
- a housing;
- optics fitted within the housing for receiving and directing the laser beam onto the substrate;
- and
- a quenching nozzle mounted on the housing for quenching the substrate at a quenching region defined within the heat affected zone.
An apparatus for splitting non-metallic substrates comprising:
- a laser for generating a laser beam;
- an integrated cracking device for receiving the laser beam and directing the laser beam onto a non-metallic substrate to define a heat affected zone and quenching the substrate at a quenching region contained within the heat affected zone, said integrated cracking device comprising
- a housing;
- a mirror and a single element lens fitted within the housing for receiving and directing the laser beam onto the substrate;
- and
- a quenching nozzle mounted on the housing for quenching the substrate at a quenching region defined within the heat affected zone.
Dependencies are inferred from the claim text.