Integrated optics beam deflectors and systems
AssigneeChiaro Networks Ltd.
InventorsEyal Shekel, Daniel Majer, Shlomo Ruschin, Guy Matmon, Jacob Vecht, Yedidia Ariel
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Abstract
This invention discloses a selectably directable optical beam deflecting device including at least at least one substrate having formed thereon a multiplicity of waveguides, each waveguide receiving light and emitting light, the totality of light emitted by said multiplicity of waveguides producing at least one selectably directable output beam, and at least one multiplexer applying electrical inputs to the at least one substrate for individually controlling the light emitted by each of the multiplicity of waveguides, thereby governing the orientation of the selectably directable output beam.
Claims32
A laser writing apparatus which includes a laser scanning unit comprising an optical beam deflection device, said beam deflecting device comprising:
- at least one substrate having formed thereon a multiplicity of waveguides, each waveguide receiving light and emitting light, the totality of light emitted by said multiplicity of waveguides producing at least one selectably directable output beam;
- and
- at least one multiplexer applying electrical inputs to said at least one substrate for individually controlled the light emitted by each of the multiplicity of waveguides, thereby governing the orientation of said selectably directable output beam.
Dependencies are inferred from the claim text.