Anode target for X-ray tube and X-ray tube therewith
AssigneesHitachi, Ltd., Hitachi Medical Corporation
InventorsNoboru Baba, Masao Shimizu, Motomichi Doi, Yuzo Kozono, Kunihiro Maeda, Masatoshi Seki
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Abstract
An X-ray tube which is high in brightness and high in resolution, and can withstand continuous long-time use, that is, it can withstand a high heat load. An X-ray target and an X-ray tube having the X-ray target include an X-ray generating metal layer having an average crystal grain diameter not larger than 30 μm on the surface of a base plate in the X-ray irradiated side. The X-ray tube has a small focus point and can withstand a high input load. A CT apparatus using the X-ray tube can provide a high resolution and a high definition image.
Claims18
An X-ray tube comprising an anode target, the anode targe including:
- a metallic base body;
- and
- an X-ray generating metallic layer, formed on a surface of the metallic base body, that generates X-rays upon irradiation with an electron beam;
- wherein the X-ray generating metallic layer includes a W-Re (tungsten-rhenium) alloy layer having a grain size of 0.9 μm to 10 μm and a thickness of 200 μm or less in at least a surface region of the X-ray generating metallic layer that is to be irradiated with the electron beam.
A method of manufacturing an X-ray tube including an anode target, the anode target including a metallic base body, and an X-ray generating metallic layer, formed on a surface of the metallic base body, that generates X-rays upon irradiation with an electron beam, the method comprising the process of maintaining the metallic base body at a temperature in a range of 250° C. to 600° C. to form the X-ray generating metallic layer on the surface of the metallic base body with a thickness of 200 μm or less composed of particles having a grain size from 0.9 μm to 10 μm using a CVD method that reduces a gas containing tungsten halide with hydrogen gas followed by heat treatment at a temperature in a range of 1000° C. to 2000° C.
An X-ray tube comprising an anode target, the anode targe including:
- a metallic base body;
- and
- an X-ray generating metallic layer, formed on a surface of the metallic base body, that generates X-rays upon irradiation with an electron beam;
- wherein the X-ray generating metallic layer includes a W-Re (tungsten-rhenium) alloy layer having a grain size of 0.9 μm to 10 μm in at least a surface region of the X-ray generating metallic layer that is to be irradiated with the electron beam.
A method of manufacturing an X-ray tube including an anode target, the anode target including a metallic base body, and an X-ray generating metallic layer, formed on a surface of the metallic base body, that generates X-rays upon irradiation with an electron beam, the method comprising the process of maintaining the metallic base body at a temperature in a range of 250° C. to 600° C. to form the X-ray generating metallic layer on the surface of the metallic base body composed of particles having a grain size from 0.9 μm to 10 μm using a CVD method that reduces a gas containing tungsten halide with hydrogen gas followed by heat treatment at a temperature in a range of 1000° C. to 2000° C.
Dependencies are inferred from the claim text.