Penetrating type X-ray tube and manufacturing method thereof
AssigneeKabushiki Kaisha Toshiba
InventorHiroki Kutsuzawa
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Abstract
The object of this invention is to provide a highly reliable penetrating type X-ray tube and a manufacturing method thereof, preventing interfacial exfoliation between a transmission window and a target film before it happens. This invention is characterized in that at least one intermediate film 39 of at least one metal element or an alloy thereof selected from a group of copper, chromium, iron, nickel, etc. between x-ray penetrating window plate 37 of beryllium stuck vacuum-tightly to a portion of evacuated envelope 33, and target film 40 of tungsten which is provided on the evacuated side of the window plate and emanates X rays is formed by a physical method such as spattering.
Claims11
A penetrating X-ray tube, comprising:
- a) an evacuated envelope;
- b) a window plate of beryllium permeable to X-rays, sealed vacuum-tightly to the evacuated envelope;
- c) a target film of tungsten or an alloy thereof, provided at the evacuated side of the window plate X-rays;
- and
- d) a cathode structure generating an electron beam impinging on the target film to generate the X-rays;
- and
- having a structure in which the X-rays generated out of the target film penetrate through the window plate, wherein at least one intermediate film of at least one metal element or alloy thereof different from tungsten is provided being in contact directly with both the window plate and the target film.
A method for manufacturing an X-ray tube having a window plate of beryllium permeable to X-rays, comprising the steps of:
- a) forming at least one intermediate film of at least one metal element or alloy thereof different from tungsten on an inner surface of an X-ray transmission window on which a target film is to be provided;
- and
- b) forming the target film on the intermediate film.
Dependencies are inferred from the claim text.