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US 6,487,230 B1Granted
Vertical cavity apparatus with tunnel junction
AssigneeBandwidth 9, Inc.
InventorsJulien Boucart, Constance Chang-Hasnain, Michael Jansen, Rashit Nabiev, Wupen Yuen
Life of this patent
Estimating the term…
Abstract
A vertical cavity apparatus includes a first mirror, a substrate and a second mirror coupled to the substrate. At least a first and a second active region are each positioned between the first and second mirrors. At least a first ion implantation layer is positioned between the first and second mirrors. At least a first tunnel junction is positioned between the first and second mirrors.
Claims101
A vertical cavity apparatus, comprising:
- a first mirror;
- a substrate;
- a second mirror coupled to the substrate;
- at least a first and a second active region each positioned between the first and second mirrors, each of the first and second active regions being made of a material that upon application of electrical or electromagnetic energy the first and second regions become optically active;
- a first ion implantation layer positioned between the first and second mirrors;
- and
- a first tunnel junction positioned between the first and second mirrors.
4 more elements
A vertical cavity surface emitting laser, comprising:
- a first mirror;
- a substrate;
- a second mirror coupled to the substrate;
- at least a first and a second active region each positioned between the first and second mirrors, each of the first and second active regions being made of a material that upon application of electrical or electromagnetic energy the first and second regions become optically active;
- a first ion implantation layer positioned between the first and second mirrors;
- and
- a first tunnel junction positioned between the first and second mirrors.
4 more elements
A detector, comprising:
- a first mirror;
- a substrate;
- a second mirror coupled to the substrate;
- at least a first and a second active region each positioned between the first and second mirrors, each of the first and second active regions being made of a material that upon application of electrical or electromagnetic energy the first and second regions become optically active;
- a first ion implantation layer positioned between the first and second mirrors;
- and
- a first tunnel junction positioned between the first and second mirrors.
4 more elements
A modulator, comprising:
- a first mirror;
- a substrate;
- a second mirror coupled to the substrate;
- at least a first and a second active region each positioned between the first and second mirrors, each of the first and second active regions being made of a material that upon application of electrical or electromagnetic energy the first and second regions become optically active;
- a first ion implantation layer positioned between the first and second mirrors;
- and
- a first tunnel junction positioned between the first and second mirrors.
4 more elements
An actuator, comprising:
- a first mirror;
- a substrate;
- a second mirror coupled to the substrate;
- at least a first and a second active region each positioned between the first and second mirrors, each of the first and second active regions being made of a material that upon application of electrical or electromagnetic energy the first and second regions become optically active;
- a first ion implantation layer positioned between the first and second mirrors;
- and
- a first tunnel junction positioned between the first and second mirrors.
4 more elements
An amplifier, comprising:
- a first mirror;
- a substrate;
- a second mirror coupled to the substrate;
- at least a first and a second active region each positioned between the first and second mirrors, each of the first and second active regions being made of a material that upon application of electrical or electromagnetic energy the first and second regions become optically active;
- a first ion implantation layer positioned between the first and second mirrors;
- and
- a first tunnel junction positioned between the first and second mirrors.
4 more elements
Dependencies are inferred from the claim text.