Back to results
US 6,487,001 B2Granted
Article comprising wedge-shaped electrodes
AssigneesAgere Systems Inc., Lucent Technologies Inc.
InventorDennis S. Greywall
Life of this patent
Estimating the term…
Abstract
An electrode for use in actuating MEMS elements. The electrode declines in height along its length from a first end thereof to second end thereof. In use, the first end of the electrode is disposed proximal to an axis of rotation or axis of bending of an overlying MEMS element. In one embodiment, the decline in height of the electrode along its length is linear such that the electrode has a wedge-shaped profile. In another embodiment, the height of the electrode declines in discrete steps such that the electrode has a stepped profile.
Claims16
An article comprising:
- an electrode that declines in height along its length from a first end thereof to a second end thereof;
- and
- an electrically conductive member that is movably supported above said electrode;
- wherein:
- said member is operable to rotate about a first axis of rotation;
- and
- relative to the second end of said electrode, the first end of said electrode is disposed proximal to said first axis of rotation.
4 more elements
Dependencies are inferred from the claim text.