Measuring apparatus
AssigneeOlympus Optical Co., Ltd.
InventorYukinaga Shitamichi
Life of this patent
Estimating the term…
Abstract
The laser beam emitted from a laser diode is applied to a sample, thereby measuring the height of the sample in accordance with the principle of trigonometrical measurement. A line-sensor camera acquires a dark-field image of the sample by using a ring-shaped illumination device, and a bright-field image of the sample by using a light source. The luminance-image data items representing the dark-field image and the bright-field image, respectively, are input to a controller. The position of the sample and the defects in the sample can thereby be detected. The position can be detected and the height can be measured, with high accuracy. This greatly relieves inspectors.
Claims15
A measuring apparatus comprising:
- first measuring means including:
- a measuring light source for emitting a measuring light,
- an objective lens, provided to oppose a sample, for focusing the measuring light on the sample,
- scanning means for two-dimensionally scanning a surface of the sample with the measuring light passing through the objective lens,
- an optical system for guiding a light beam reflected by the sample to a plane on which a pupil of the objective lens is projected and focusing part of the guided light beam, the part of the guided light beam to be focused having an optical axis positioned apart for a distance from an optical axis of the guided light beam,
- optical position detecting means, provided on a plane where the part of the guided light beam is focused by the optical system, for detecting a shift amount of a beam-spot that shifts in accordance with a height of the sample, and
- height-calculating means for calculating the height of the sample from the shift amount detected by the optical position-detecting means;
- and
- second measuring means for receiving through the objective lens a light reflected or scattered by the sample to which an illumination light is applied from an illumination light source, and thereby acquiring two-dimensional data,
- wherein the objective lens is provided at a position where an optical axis related to the first measuring means and an optical axis related to the second measuring means overlap each other.
Dependencies are inferred from the claim text.