Shape measuring method and shape measuring device, position control method, stage device, exposure apparatus and method for producing exposure apparatus, and device and method for manufacturing device
AssigneeNikon Corporation
InventorKenji Nishi
Life of this patent
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Abstract
The shape of a reflecting surface (7XS) formed on a moving object (4) moving along a reference plane is measured by measuring one-dimensional shapes of the reflecting surface (7XS) along the extending direction of the reflecting surface (7XS) at a plurality of different positions in a direction perpendicular to the reference plane. At least one of the position and posture of the moving object (4) is accurately controlled on the basis of the shape information obtained in this manner, the two-dimensional position information of the moving object (4), and the tilt information of the reflecting surface (7XS).
Claims41
A shape measuring method of measuring a shape of a reflecting surface which is formed on a moving object moving along a reference plane perpendicular to a first axis and extends along a second axis direction perpendicular to said first axis direction, wherein a one-dimensional shape of said reflecting surface in said second axis direction is measured at least at two positions in said first axis direction while said moving object is moved along a third axis direction which is perpendicular to said first axis direction and is not perpendicular to said second axis direction.
A shape measuring unit for measuring a shape of a reflecting surface which is formed on a moving object moving along a reference plane perpendicular to a first axis and extends along a second axis direction perpendicular to said first axis direction, comprising:
- a first driving unit connected to said moving object to move moving said moving object along a third axis direction which is perpendicular to said first axis direction and is not perpendicular to said second axis direction;
- and
- a measuring unit which measures a one-dimensional shape of said reflecting surface in said second axis direction at least at two positions in said first axis direction.
Dependencies are inferred from the claim text.