Method of evaluating an anisotropic thin film and an evaluating apparatus
AssigneesNEC Corporation, Nippon Laser & Electronics Lab.
InventorsIchiro Hirosawa, Daisuke Tanooka
Life of this patent
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Abstract
In an apparatus for evaluating an anisotropic thin film, an optical system generates a light beam having a predetermined diameter and polaraization state to project the light beam as incident light into a thin film sample corresponding to the anisotropic thin film. An analyzer is disposed at an optically down stream side of the thin film sample. At an optically down stream side of the analyzer, a two-dimensional photo-intensity detector is disposed to detect reflected light, obtained from the thin film sample, through the analyzer. The detector produces a light intensity distribution. On the basis of the light intensity distribution, an evaluating unit evaluates an inplane distribution of an optical anisotropy of the thin film sample.
Claims20
A method for evaluating an anisotropic thin film, comprising the steps of:
- using a lens, a polarizer, and a phase converter to generate a light beam having a predetermined diameter and polarization state and to project said light beam as incident light into a thin film sample corresponding to said anisotropic thin film;
- detecting, by a two-dimensional photo-intensity detector through an analyzer, reflected light obtained from said thin film sample to produce a light intensity distribution;
- and
- evaluating an inplane distribution of an optical anisotropy of said thin film sample on the basis of said light intensity distribution.
An apparatus for evaluating an anisotropic thin film, comprising:
- an optical system comprising lens, a polarizer, and a phase converter, said optical system generating a light beam having a predetermined diameter and polarization state to project said light beam as incident light into a thin film sample corresponding to said anisotropic thin film;
- an analyzer disposed at an optically down stream side of said thin film sample;
- a two-dimensional photo-intensity detector disposed at an optically down stream side of said analyzer for detecting reflected light, obtained from said thin film sample, through said analyzer to produce a light intensity distribution;
- and
- an evaluating unit connected to said two-dimensional photo-intensity detector for evaluating an inplane distribution of an optical anisotropy of said thin film sample on the basis of said light intensity distribution.
Dependencies are inferred from the claim text.