Relative-displacement detecting unit
AssigneeMitutoyo Corporation
InventorToshiharu Miyata
Life of this patent
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Abstract
A detect ion unit 10, which is disposed in opposite relation to a scale 12, includes a transmission coil 10a and a detection coil 10b. A metal film 10g formed of two opposing metal films is provided between a silicon substrate and the transmission coil 10a, one of the two metal films is connected to a drive circuit 10c, and the other is connected to the transmission coil 10a. The metal film 10g provides the capacitance C of an LC resonance circuit, so that a chip capacitor is made unnecessary. The metal film 10g may be formed of a magnetic material.
Claims9
A relative-displacement detecting unit for detecting a relative displacement of said relative-displacement detecting unit and a scale opposing said relative-displacement detecting unit, and for outputting it as an electrical signal, said unit comprising:
- a substrate;
- a transmitting section formed on said substrate and driven by a drive circuit;
- and
- a first metal film formed between said substrate and said transmitting section so as to form a capacitor connected between said transmitting section and the drive circuit.
Dependencies are inferred from the claim text.