Wafer probe station having environment control enclosure
AssigneeCascade Microtech, Inc.
InventorsWarren K. Harwood, Paul A. Tervo, Martin J. Koxxy
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Abstract
A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
Claims7
A probe station comprising:
- (a) a laterally extending surface for supporting a test device on said surface;
- (b) at least one probe support for an electrical probe for contacting said test device;
- (c) an environment control enclosure substantially surrounding said surface and having a side portion, said surface being movable by a positioning mechanism laterally toward and away from said side portion;
- (e) said enclosure including overlapping, relatively slidable members extending laterally beneath said surface, said slidable members being of different sizes and including apertures of different sizes, said positioning mechanism having a positioning member extending through said apertures in said slidable members for selectively moving said surface laterally.
Dependencies are inferred from the claim text.