Magnetic field sensor having deformable conductor loop segment
AssigneeRobert Bosch GmbH
InventorsKarsten Funk, Wilhelm Frey
Life of this patent
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Abstract
A magnetic field sensor that can be manufactured using the technology of surface micromechanics, having a conductor loop that has at least one deformable segment; a deformation device for deforming the deformable segment of the conductor loop with a predeterminable time dependence; a voltage sensing device for sensing the voltage induced at the ends of the conductor loop upon deformation in the presence of a magnetic field; and a magnetic field determining device for determining the present static and/or dynamic magnetic field in consideration of at least the time dependence of the deformation.
Claims14
A magnetic field sensor, comprising:
- a conductor loop including at least one deformable segment;
- a deformation device for deforming the at least one deformable segment of the conductor loop with a predeterminable time dependence;
- a voltage sensing device for sensing a voltage induced at ends of the conductor loop upon deformation in a presence of a magnetic field;
- and
- a magnetic field determining device for determining the magnetic field when the magnetic field is in at least one of a present static state and a present dynamic state in consideration of at least the time dependence of the deformation, wherein:
- the deformation device deforms the at least one deformable segment by generating electrostatic attractive forces via a capacitive coupling.
The magnetic field sensor according to claim wherein:
- the magnetic field sensor is manufactured using a surface micromechanics technology.
Dependencies are inferred from the claim text.