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US 6,486,597 B1Granted
Electrically tunable low secondary electron emission diamond-like coatings and process for depositing coatings
AssigneeNV Bekaert SA
InventorsArvind Goel, Craig Anthony Outten, Chandra Venkatraman, Philip Swab
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Abstract
A diamond-like carbon-containing material useful as a coating for electronic devices including field emission devices and color television tubes, the coatings having both low secondary electron emission coefficients of less than unity and electrical resistivity tunable over a range of from about 10e−2 to about 10e16.
Claims19
An electrical device comprising a substrate and coating, said coating comprising carbon and silicon, and having a secondary electron emission coefficient less than about one.
A method of improving the performance of an electrical device comprising:
- providing an electrical device comprising an electron source, an electron target and a passive element;
- positioning the source, the target and the passive element so that electrons from the source may impinge on the passive element, and secondary electrons emitted from the passive element impinge on the target;
- and
- depositing on the passive element a coating comprising carbon and silicon on a surface of the passive element for reducing the secondary electron emission coefficient of the surface to less than about one.
1 more element
Dependencies are inferred from the claim text.