Inspecting system using electron beam and inspecting method using same

An inspecting system comprising:

• an electron source for generating an electron beam;
• lens means for focusing the electron beam;
• a sample table for placing a sample thereon;
• electron beam scanning means for causing the focused electron beam to scan on the sample;
• a detector for detecting secondary charged particles emanated from the sample;
• means for comparing an image signal based on a signal outputted from the detector with a reference signal;
• and
• a monitoring device for displaying the image signal thereon,
• wherein the monitoring device is provided with means for distinctively displaying, within a scan area of the electron beam scanning means, areas each having a predetermined width at its scan start end and scan completion end, and image areas lying therein.

An inspecting system comprising:

• an electron source for generating an electron beam;
• lens means for focusing the electron beam;
• a sample table for placing a sample thereon;
• electron beam scanning means for causing the focused electron beam to scan on the sample in a relationship of coexistence between a fast scan on the sample in a first direction and a slow scan on the sample in a second direction substantially orthogonal to the first direction;
• a detector for detecting secondary charged particles emanated from the sample;
• means for comparing an image signal based on a signal outputted from the detector with a reference signal;
• a monitoring device for displaying the image signal thereon;
• and
• means for setting end areas lying within an area for the slow scan in the slow scanning direction and unused in the image comparing means.

An inspecting method using an electron beam, comprising the steps:

• a step for applying the electron beam to a sample to scan;
• a step for blanking the application of the electron beam to the sample;
• a step for detecting secondary charged particles emanated from the sample;
• a step for generating a horizontal or vertical synchronizing signal for determining a period to detect the secondary charged particles;
• a step for inspecting the sample, based on the detected signal;
• a step for stopping the blanking at a start end of a scan area for the electron beam after the startup of the horizontal or vertical synchronizing signal;
• and
• a step for inactivating the horizontal or vertical synchronizing signal at an end of the scan area for the electron beam after the start of the blanking.

An inspecting method using an electron beam, comprising the steps:

• a step for applying the electron beam to a sample to scan;
• a step for blanking the application of the electron beam to the sample;
• a step for detecting secondary charged particles emanated from the sample;
• a step for generating a horizontal or vertical synchronizing signal for determining a period to detect the secondary charged particles;
• a step for inspecting the sample, based on the detected signal;
• a step for activating the horizontal or vertical synchronizing signal at a start end of a scan area for the electron beam after the stop of the blanking;
• and
• a step for starting the blanking at an end of the scan area for the electron beam after the inactivation of the horizontal or vertical synchronizing signal.

An inspecting method using an electron beam, comprising the steps:

• a step for applying the electron beam to a sample to scan;
• a step for detecting secondary charged particles emanated from the sample;
• a step for generating a horizontal or vertical synchronizing signal for determining a period to detect the secondary charged particles;
• a step for inspecting the sample, based on the detected signal;
• a step for activating the horizontal or vertical synchronizing signal after the start of scanning of the electron beam;
• and
• a step for inactivating the horizontal or vertical synchronizing signal before the stop of scanning of the electron beam.

An inspecting method using an electron beam, comprising the steps:

• a step for applying the electron beam to a sample to scan in a horizontal or vertical direction;
• a step for blanking the application of the electron beam to the sample;
• a step for detecting secondary charged particles emanated from the sample;
• a step for generating a horizontal or vertical synchronizing signal for determining a period to detect the charged particle;
• a step for inspecting the sample, based on the detected signal;
• a step for stopping the blanking at a start end of a horizontal scan area after the activation of the horizontal synchronizing signal;
• a step for inactivating the horizontal synchronizing signal at an end of the horizontal scan area after the start of the blanking;
• a step for activating the vertical synchronizing signal at a start end of a vertical scan area after the stop of the blanking;
• and
• a step for starting the blanking at an end of the vertical scan area after the inactivation of the vertical synchronizing signal.