Composite charge particle beam apparatus
AssigneeSeiko Instruments Inc.
InventorMasamichi Oi
Life of this patent
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Abstract
A charged particle beam apparatus has a plurality of charged particle beam generating systems disposed in a chamber and a neutralizing coil for neutralizing a first charged particle beam generating system to control the magnetic field in the path of a charged particle beam generated by a second charged particle beam system. The first charged particle beam generating system comprises one or more electron beam lens barrels, and the second charged particle beam generating system comprises one or more focused ion beam lens barrels. The neutralizing coil controls an excitation current of the objective lens of a first electron beam lens barrel.
Claims21
A composite charged particle beam apparatus comprising:
- a sample chamber;
- one or more focused ion beam lens barrels disposed in the sample chamber;
- one or more electron beam lens barrels disposed in the sample chamber;
- and a neutralization coil disposed in the sample chamber close to an objective lens of an electron beam lens barrel for producing a magnetic field effective to neutralize residual magnetism of the objective lens of the electron beam lens barrel when a focused ion beam lens barrel is activated to irradiate a sample with a focused ion beam and the electron beam lens barrel is deactivated.
A composite charged particle beam apparatus comprising:
- a sample chamber;
- one or more focused ion beam lens barrels disposed in the sample chamber;
- one or more electron beam lens barrels disposed in the sample chamber;
- and an attenuation alternating current circuit for producing a magnetic field effective to neutralize residual magnetism of an objective lens of an electron beam lens barrel when a focused ion beam lens barrel is activated to irradiate a sample with a focused ion beam and the electron beam lens barrel is deactivated.
A charged particle beam apparatus comprising:
- a chamber;
- a plurality of charged particle beam generating systems disposed in the chamber;
- and neutralizing means for producing a magnetic field effective to neutralize a magnetic field produced by a first charged particle beam generating system upon deactivation of the first charged particle beam generating system and activation of a second charged particle beam generating system to control the magnetic field in the path of a charged particle beam generated by the second charged particle beam generating system.
Dependencies are inferred from the claim text.