Optical detector for measuring relative displacement of an object on which a grated scale is formed
AssigneeDr. Johannes Heiden Hain GmbH
InventorsPeter Speckbacher, Dieter Michel
Life of this patent
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Abstract
Electronic components of an optoelectronic sensor for a measuring system are arranged on the side of a semiconductor substrate that is facing away from a scale. The semiconductor substrate between electronic components and the scale is removed at those locations where the components emit or detect an electromagnetic beam. In this way, it is possible to arrange all of the electrical connections of the components and further electronic assemblies of the measuring system on a first side of the semiconductor substrate, and all optical components of the measuring system on a second side of the semiconductor substrate.
Claims28
An integrated optoelectronic sensor for scanning a scale that has a scale graduation marking, comprising:
- a semiconductor substrate having a first face facing away from the scale;
- a plurality of photo detectors disposed adjacent to the semiconductor substrate;
- first portions of the semiconductor substrate defining openings extending through the semiconductor substrate adjacent to the photo detectors;
- a light source disposed on the first face;
- second portions defining openings through the semiconductor substrate, said second portions being disposed adjacent the light source;
- and
- a carrier body having at least one grating structure, the carrier body being disposed on a second face of the semiconductor substrate facing the scale.
A measuring system comprising:
- a scale;
- scale graduation markings disposed on the scale;
- an integrated optoelectronic sensor for scanning the scale, said integrated optoelectronic sensor further comprising:
- a semiconductor substrate having a first face facing away from the scale;
- a blocking layer disposed on the first face of the semiconductor substrate;
- a semiconductor layer disposed on the blocking layer, opposite the semiconductor substrate;
- a plurality of photo detectors disposed on the semiconductor layer;
- first portions of the semiconductor substrate defining openings extending through the semiconductor substrate adjacent to the photo detectors;
- a light source disposed on the first face;
- second portions defining openings through the semiconductor layer, the blocking layer, and the semiconductor substrate, said second portions being disposed adjacent the light source;
- and
- a carrier body having at least one grating structure, the carrier body being disposed on a second face of the semiconductor substrate facing the scale.
An integrated optoelectronic sensor for scanning a scale that includes a scale graduation marking, comprising:
- a semiconductor substrate having a first face facing away from the scale;
- a plurality of photo detectors disposed adjacent to the semiconductor substrate;
- first portions of the semiconductor substrate defining openings extending through the semiconductor substrate adjacent to the photo detectors;
- a light source disposed on the first face;
- second portions defining openings through the semiconductor substrate, said second portions disposed adjacent the light source;
- a carrier body having at least one grating structure, the carrier body disposed on a second face of the semiconductor substrate facing the scale;
- a blocking layer disposed on the first face of the semiconductor substrate;
- and
- a semiconductor layer disposed on the blocking layer, opposite the semiconductor substrate;
- wherein the second portions define openings also through the semiconductor layer and the blocking layer.
Dependencies are inferred from the claim text.