Method of manufacturing an electric heating element

A method for manufacturing an electric heating element comprising:

• forming a paste film including a mixture of Si powder and a silicide-forming metal powder between two preformed sintered electric insulating nitride or carbide ceramic substrates, said metal being selected from the group consisting of Cr, Mo, W, Fe, Ni, Co, B, P, Pt, Pd, Rh, Ir, Cu, Ag, V, Nb, Ta, Ti, Zr, Hf, Y, Mn, Ca, Mg, rare earth elements, Al, and mixtures thereof;
• heating the paste film above the solidus line thereof and fusing the film onto the surfaces of said ceramic substrates to form a mixture of (i) a silicide formed by reaction of the Si powder with said silicide-forming metal powder, and (ii) Si;
• and
• solidifying the fused film to form a resistance heat-generating material film of a mixture of the silicide and Si having a microstructure of a metallurgically solidified structure including eutectic structure.

A method for manufacturing an electric heating element comprising:

• forming a paste film including a mixture of Si powder and a metal powder on a preformed sintered electric insulating nitride or carbide ceramic substrate, said metal being selected from the group consisting of Cr, Mo, W, Fe, Ni, Co, B, P, Pt, Pd, Rh, Ir, Cu, Ag, V, Nb, Ta, Ti, Zr, Hf, Y, Mn, Ca, Mg, rare earth elements, Al and mixtures thereof;
• heating and melting the paste film above the solidus line thereof and fusing the film onto the surface of said ceramic substrate to form a mixture of (i) a silicide formed by reaction of the Si powder with said metal powder, and (ii) Si;
• and
• solidifying the fused film to form a resistance heat-generating material film comprising a mixture of the silicide and Si having a microstructure of a metallurgically solidified structure including eutectic structure, wherein the linear thermal expansion coefficient of said resistance heat-generating material film is nearly or equally matched with the linear thermal expansion coefficient of said substrate during said solidifying process by selecting the metal and the amount of the metal.