Apparatus for transforming semiconducting thin layer
AssigneeNEC Corporation
InventorHiroshi Tanabe
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AssigneeNEC Corporation
InventorHiroshi Tanabe
Estimating the term…
Disclosed is an apparatus for modifying a semiconducting thin layer, which has: a hermetically sealed container having a substrate mount section for mounting thereon a substrate with an amorphous semiconducting thin layer formed thereon, and a light transmissive window for introducing a laser beam; laser beam irradiation means for heat-melting the amorphous semiconducting thin layer; holding means for fixing and holding the substrate on the substrate mount section; and pressure control means which regulates the flow rate of gas fed into the hermetically sealed container to control the pressure of the atmosphere within the hermetically sealed container at the time of irradiation with the laser beam at a value above a vapor pressure specified by the temperature of the heat-melted amorphous semiconducting thin layer.
An apparatus for transforming a semiconducting thin layer, comprising:
Dependencies are inferred from the claim text.