Electrostatic microrelay

A wireless device comprising a microrelay, the microrelay comprising:

• a fixed substrate having a fixed electrode and a fixed terminal on a upper surface thereof;
• a moveable substrate having a moveable electrode and a moveable terminal on a upper surface thereof, the moveable substrate elastically supported by a support member disposed between the fixed substrate and the moveable substrate in a manner that the lower surface of the moveable substrate faces the upper surface of the fixed substrate at a predetermined distance;
• and
• a protrusion provided on at least one of the lower surface of the fixed substrate and the upper surface of the moveable substrate in the area the moveable electrode is attracted when applying voltage between the moveable electrode and the fixed electrode, the protrusion having a predetermined height;
• wherein, upon applying voltage between the moveable electrode and the fixed electrode, the moveable electrode is attracted to the fixed electrode such that the protrusion provided on one of the upper surface of the fixed substrate and the lower surface of the moveable substrate contacts the other substrate and the moveable terminal elastically contacts the fixed terminal to close the microrelay in this order, and, upon releasing the voltage from the electrode, the moveable terminal becomes reliably separated from the fixed terminal by a repulsive elastic force caused by the contact between the protrusion and the other substrate, the microrelay interconnected between an antenna and an internal circuit.

A measuring device comprising an electrostatic microrelay, the microrelay comprising:

• a fixed substrate having a fixed electrode and a fixed terminal on a upper surface thereof;
• a moveable substrate having a moveable electrode and a moveable terminal on a upper surface thereof, the moveable substrate elastically supported by a support member disposed between the fixed substrate and the moveable substrate in a manner that the lower surface of the moveable substrate faces the upper surface of the fixed substrate at a predetermined distance;
• and
• a protrusion provided on at least one of the lower surface of the fixed substrate and the upper surface of the moveable substrate in the area the moveable electrode is attracted when applying voltage between the moveable electrode and the fixed electrode, the protrusion having a predetermined height;
• wherein, upon applying voltage between the moveable electrode and the fixed electrode, the moveable electrode is attracted to the fixed electrode such that the protrusion provided on one of the upper surface of the fixed substrate and the lower surface of the moveable substrate contacts the other substrate and the moveable terminal elastically contacts the fixed terminal to close the microrelay in this order, and, upon releasing the voltage from the electrode, the moveable terminal becomes reliably separated from the fixed terminal by a repulsive elastic force caused by the contact between the protrusion and the other substrate, the microrelay interconnected between a measurement object and an internal circuit.