Polyimides, process for producing the same and photosensitive composition containing the same
AssigneeNippon Mektron, Ltd.
InventorsLin-chiu Chiang, Jenq-Tain Lin, Nobuyuki Sensui
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AssigneeNippon Mektron, Ltd.
InventorsLin-chiu Chiang, Jenq-Tain Lin, Nobuyuki Sensui
Estimating the term…
Polyimide is produced by reacting two kinds of diamine compounds consisting of diaminopolysiloxane and a carboxyl group-containing diamine or three kinds of diamine compounds consisting of diaminopolysiloxane, a carboxyl group-containing diamine and an aromatic or alicyclic diamine with a dicarboxylic acid anhydride having a 2,5-dioxotetrahydrofuryl group as one acid anhydride group, thereby once forming a polyamic acid, and subjecting the polyamic acid to polyimidization reaction. The resulting polyimide itself is soluble in low boiling organic solvents for, general purpose use, typically methyl ethyl ketone. A photosensitive composition comprising the polyimide, a photo crosslinking agent and a photo acid-generating agent forms a negative type polyimide pattern upon development with an aqueous alkali solution.
A polyimide soluble in an aqueous solution of an alkaline which comprises a copolymer of.
A process for producing a polyimide which is soluble in an aqueous solution of an alkaline compound, which comprises reacting:
Dependencies are inferred from the claim text.