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US 6,486,019 B2Granted
Process for producing a first electrode and a second electrode, electronic component and electronic memory element
OwnerMargit Sarstedtinventor
Life of this patent
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Abstract
In a process for producing a first electrode and a second electrode, the first electrode and the second electrode are provided on an electrode material. A cluster ion source is used to apply clusters of the electrode material to the first electrode and/or the second electrode.
Claims9
Process for producing a first electrode and a second electrode, in which the first electrode and the second electrode are provided from an electrode material, in which a cluster ion source is used to apply clusters of the electrode material to the first electrode and/or the second electrode.
Dependencies are inferred from the claim text.