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US 6,485,993 B2Granted
Method of making opto-electronic devices using sacrificial devices
AssigneeTeraconnect, Inc.
InventorsJohn A. Trezza, Gregory K. Dudoff
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Abstract
A method for making optoelectronic devices with interdigitated arrays of photonic devices is disclosed wherein an array of first type photonic devices and sacrificial device(s) is hybridized to a driver circuitry substrate, the sacrificial devices are removed, and an array of second type photonic devices is hybridized into the spaces left by removal of the sacrificial devices.
Claims13
A method of making a hybrid optoelectronic device, the method comprising:
- hybridizing a first substrate and a second substrate, said second substrate including at least one first type optical device and at least one sacrificial device;
- introducing a first flowable hardenable material to join said first and second substrates;
- curing said first flowable hardenable material;
- removing said second substrate;
- removing said at least one sacrificial device;
- hybridizing said first substrate and a third substrate, said third substrate including at least one second type optical device;
- introducing a second flowable hardenable material to join said first and third substrates;
- curing said second flowable hardenable material;
- and
- removing said third substrate.
7 more elements
Dependencies are inferred from the claim text.